Surface treatment for multi-crystalline silicon wafer sliced by diamond wire saw

Teng-Yu Wang, Wen-Jong Lih, Cheng-Yao Cheng, J. Liu, Wen-Hsin Lin
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引用次数: 1

Abstract

Silicon wafers sliced with diamond wire saw and SiC slurry are compared in this study. Diamond wire saw have high slicing speed and the cost is lower than slurry cut process. However it is not suitable for multi-crystalline wafer slicing process. In this study, a surface treatment process was used on the diamond wire cut multi-crystalline silicon wafer. With the modification of wafer surface, the surface quality and solar cell characteristics could be improved. The energy conversion efficiency was increased from 17.7% to 18.4%, which is comparable to the solar cell from conventional slurry cut. Furthermore, there is a decline in wafering cost.
金刚石线锯切割多晶硅片的表面处理
对金刚石线锯和SiC浆料切割硅片进行了比较。金刚石线锯具有切割速度快、成本低的优点。但它不适合多晶片切片工艺。本研究采用金刚石线切割多晶硅片的表面处理工艺。通过对硅片表面进行改性,可以改善表面质量和太阳能电池的性能。能量转换效率由17.7%提高到18.4%,与传统浆料切割太阳能电池相当。此外,晶圆成本也有所下降。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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