{"title":"Модификация поверхности и распыление кремния при бомбардировке ионами С60","authors":"","doi":"10.34077/silicon2022-42","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":32503,"journal":{"name":"Sel''skokhoziaistvennye mashiny i tekhnologii","volume":"4 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2022-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sel''skokhoziaistvennye mashiny i tekhnologii","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.34077/silicon2022-42","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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