High spatial resolution microscopy with functional thin film

Abstract

We have developed a microscope that overcomes the limitations of using a focused electron beam. A superresolution optical microscope using a nano-sized optical spot generated by irradiating an ultra-thin luminescent film with an electron beam was shown. A high spatial resolution chemical sensor that visualizes the ion concentration distribution has also been developed. By applying an electron beam with high convergence in this way, it is possible to develop a microscope with high spatial resolution beyond the diffraction limit.