A. Schulze, R. Loo, L. Witters, H. Mertens, A. Gawlik, N. Horiguchi, N. Collaert, M. Wormington, P. Ryan, W. Vandervorst, M. Caymax
{"title":"Strain and Compositional Analysis of (Si)Ge Fin Structures Using High Resolution X‐Ray Diffraction","authors":"A. Schulze, R. Loo, L. Witters, H. Mertens, A. Gawlik, N. Horiguchi, N. Collaert, M. Wormington, P. Ryan, W. Vandervorst, M. Caymax","doi":"10.1002/PSSC.201700156","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":20065,"journal":{"name":"Physica Status Solidi (c)","volume":"83 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2017-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physica Status Solidi (c)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/PSSC.201700156","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}