Varifocal MEMS mirrors for high-speed axial focus scanning: a review.

IF 7.3 1区工程技术 Q1 INSTRUMENTS & INSTRUMENTATION

Microsystems & Nanoengineering Pub Date : 2023-10-27 eCollection Date: 2023-01-01 DOI:10.1038/s41378-022-00481-0

Jaka Pribošek, Markus Bainschab, Takashi Sasaki

{"title":"Varifocal MEMS mirrors for high-speed axial focus scanning: a review.","authors":"Jaka Pribošek, Markus Bainschab, Takashi Sasaki","doi":"10.1038/s41378-022-00481-0","DOIUrl":null,"url":null,"abstract":"<p><p>Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operation above several hundred kHz, and can be designed to combine focusing with lateral steering in a single-chip device. This survey summarizes the past 50 years of scientific progress in varifocal MEMS mirrors, providing the most comprehensive study in this field to date. We introduce a novel figure of merit for varifocal mirrors on the basis of which we evaluate and compare nearly all reported devices from the literature. At the forefront of this review is the analysis of the advantages and shortcomings of various actuation technologies, as well as a systematic study of methods reported to enhance the focusing performance in terms of speed, resolution, and shape fidelity. We believe this analysis will fuel the future technological development of next-generation varifocal mirrors reaching the axial resolution of 1000 resolvable planes.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"9 ","pages":"135"},"PeriodicalIF":7.3000,"publicationDate":"2023-10-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10603115/pdf/","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microsystems & Nanoengineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1038/s41378-022-00481-0","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2023/1/1 0:00:00","PubModel":"eCollection","JCR":"Q1","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}

引用次数: 0

Abstract

Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operation above several hundred kHz, and can be designed to combine focusing with lateral steering in a single-chip device. This survey summarizes the past 50 years of scientific progress in varifocal MEMS mirrors, providing the most comprehensive study in this field to date. We introduce a novel figure of merit for varifocal mirrors on the basis of which we evaluate and compare nearly all reported devices from the literature. At the forefront of this review is the analysis of the advantages and shortcomings of various actuation technologies, as well as a systematic study of methods reported to enhance the focusing performance in terms of speed, resolution, and shape fidelity. We believe this analysis will fuel the future technological development of next-generation varifocal mirrors reaching the axial resolution of 1000 resolvable planes.

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用于高速轴向聚焦扫描的变焦距MEMS反射镜：综述。

最近的进展使基于MEMS的变焦镜的性能达到了与传统超高速聚焦器件相当的水平。变焦距镜正变得能够实现超过300个可分辨平面的高轴向分辨率，可以实现微秒的响应时间，在几百kHz以上的连续操作，并且可以设计为在单片设备中结合聚焦和横向转向。这项调查总结了过去50年在变焦MEMS反射镜方面的科学进展，提供了迄今为止该领域最全面的研究。我们介绍了一种新颖的变焦镜品质因数，在此基础上，我们对文献中几乎所有报道的设备进行了评估和比较。这篇综述的前沿是对各种致动技术的优缺点的分析，以及对据报道在速度、分辨率和形状保真度方面提高聚焦性能的方法的系统研究。我们相信，这一分析将推动下一代变焦镜的未来技术发展，达到1000个可分辨平面的轴向分辨率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)

CiteScore

12.00

自引率

3.80%

发文量

123

审稿时长

20 weeks

期刊介绍： Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.