A Technological Approach for Miniaturization of Three-Dimensional Inductive Levitation Microsuspensions

IF 1.1 4区物理与天体物理 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Magnetics Letters Pub Date : 2022-03-11 DOI:10.1109/LMAG.2022.3174522

Emil R. Mamleyev;Achim Voigt;Ali Moazenzadeh;Jan G. Korvink;Manfred Kohl;Kirill Poletkin

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引用次数: 0

Abstract

In this letter, we report on a technological approach for miniaturization of a inductive levitating microsuspension based on nested three-dimensional (3-D) microcoil structures. In the developed approach, each 3-D microcoil is fabricated separately, beginning with the innermost and thus the smallest coil diameter of the nested microstructure. This helps to overcome fabrication restrictions due to the wire-bonding process and is primarily caused by the size of the bond-head and provides the opportunity to fabricate smaller nested 3-D microcoil structures. We fabricated a nested two-microcoil structure, the inner coil having a diameter of 1000

$\mu$

m and 14 windings, the outer coil with a diameter of 1900

$\mu$

m and eight windings, and demonstrated its application as an inductive levitating microsuspension. In particular, a fabricated 3-D inductive levitating microsuspension was able to levitate a 1100

$\mu$

m diameter disc-shaped proof mass at a height up to 45

$\mu$

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三维诱导悬浮微悬浮液小型化的技术途径

在这封信中，我们报道了一种基于嵌套三维（3-D）微线圈结构的感应悬浮微悬架的小型化技术方法。在所开发的方法中，每个三维微线圈都是单独制造的，从嵌套微结构的最内层开始，因此是最小的线圈直径。这有助于克服由引线键合工艺引起的制造限制，并且主要由键合头的尺寸引起，并且提供了制造更小的嵌套3-D微线圈结构的机会。我们制作了一个嵌套的两个微线圈结构，内部线圈直径为1000$\mu$m，有14个绕组，外部线圈直径为1900$\mu$m，有8个绕组，并展示了其作为感应悬浮微悬浮的应用。特别地，制造的三维感应悬浮微悬浮液能够将直径1100$\mu$m的圆盘形检验质量悬浮在高达45$\mu$m的高度。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Magnetics Letters PHYSICS, APPLIED-

CiteScore

2.40

自引率

0.00%

发文量

期刊介绍： IEEE Magnetics Letters is a peer-reviewed, archival journal covering the physics and engineering of magnetism, magnetic materials, applied magnetics, design and application of magnetic devices, bio-magnetics, magneto-electronics, and spin electronics. IEEE Magnetics Letters publishes short, scholarly articles of substantial current interest. IEEE Magnetics Letters is a hybrid Open Access (OA) journal. For a fee, authors have the option making their articles freely available to all, including non-subscribers. OA articles are identified as Open Access.