A Technological Approach for Miniaturization of Three-Dimensional Inductive Levitation Microsuspensions

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2022-03-11 DOI:10.1109/LMAG.2022.3174522

Emil R. Mamleyev;Achim Voigt;Ali Moazenzadeh;Jan G. Korvink;Manfred Kohl;Kirill Poletkin

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引用次数: 0

Abstract

In this letter, we report on a technological approach for miniaturization of a inductive levitating microsuspension based on nested three-dimensional (3-D) microcoil structures. In the developed approach, each 3-D microcoil is fabricated separately, beginning with the innermost and thus the smallest coil diameter of the nested microstructure. This helps to overcome fabrication restrictions due to the wire-bonding process and is primarily caused by the size of the bond-head and provides the opportunity to fabricate smaller nested 3-D microcoil structures. We fabricated a nested two-microcoil structure, the inner coil having a diameter of 1000

$\mu$

m and 14 windings, the outer coil with a diameter of 1900

$\mu$

m and eight windings, and demonstrated its application as an inductive levitating microsuspension. In particular, a fabricated 3-D inductive levitating microsuspension was able to levitate a 1100

$\mu$

m diameter disc-shaped proof mass at a height up to 45

$\mu$

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三维诱导悬浮微悬浮液小型化的技术途径

在这封信中，我们报道了一种基于嵌套三维（3-D）微线圈结构的感应悬浮微悬架的小型化技术方法。在所开发的方法中，每个三维微线圈都是单独制造的，从嵌套微结构的最内层开始，因此是最小的线圈直径。这有助于克服由引线键合工艺引起的制造限制，并且主要由键合头的尺寸引起，并且提供了制造更小的嵌套3-D微线圈结构的机会。我们制作了一个嵌套的两个微线圈结构，内部线圈直径为1000$\mu$m，有14个绕组，外部线圈直径为1900$\mu$m，有8个绕组，并展示了其作为感应悬浮微悬浮的应用。特别地，制造的三维感应悬浮微悬浮液能够将直径1100$\mu$m的圆盘形检验质量悬浮在高达45$\mu$m的高度。

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.