{"title":"Al積層AZO薄膜のその場熱処理による低抵抗化と積層界面の化学状態分析","authors":"Naoya Koga, H. Makino","doi":"10.1384/jsa.29.202","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":90628,"journal":{"name":"Journal of surface analysis (Online)","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of surface analysis (Online)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1384/jsa.29.202","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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