Development of Secondary Ion Optical System to Achieve Three-Dimensional Shave-off SIMS

Abstract

Secondary ion mass spectrometry (SIMS) has some disadvantages including degradation in depth resolution depending on the depth which are difficult to resolve. To address these disadvantages, we have previously developed shave-off SIMS and achieved two-dimensional mapping. In this study, we designed the appropriate secondary ion optical system by simulation to achieve three-dimensional shave-off SIMS. We developed new optical parts and evaluated the abilities of the designed secondary ion optical system. We acquired the following abilities of the secondary ion optical system: magnification ratio 1.6 × 10, Z-axial resolution 0.70 m, and transmission > 0.1%.