Design and Fabrication of Birdcage Resonators for Low-pressure Plasma Excitation

IF 0.5 4区工程技术 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC

Radioengineering Pub Date : 2023-01-01 DOI:10.13164/re.2023.0044

K. Jurík, J. Starý, P. Drexler

引用次数: 0

Abstract

. This paper presents a design, analysis and optimization of birdcage resonators employed in a novel radiofrequency plasma source. Three resonators were simulated and fabricated. The resonators differ in their design and in the different materials of used dielectric – polyimide and polytetrafluorethylene (PTFE). The resonance frequency of fabricated samples possesses a maximal error of 2.2% compared to the simulated values. The performance in plasma excitation is related to the electrical parameters, while the best performing resonator (PTFE-based) exhibits the maximum real impedance of 644.3 Ω at the resonance frequency and the 799.5 V/m electric field strength. This resonator shows the best power efficiency in a plasma ignition experiment. The resonator ignited the discharge at ca. 1 Pa of am-bient air atmosphere with only 0.34 W of input radiofrequency power.

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用于低压等离子体激发的鸟笼式谐振器的设计与制造

。本文介绍了一种新型射频等离子体源的鸟笼谐振器的设计、分析和优化。模拟并制作了三个谐振腔。谐振器的设计不同，使用的介质材料不同——聚酰亚胺和聚四氟乙烯(PTFE)。制备样品的共振频率与模拟值的最大误差为2.2%。谐振腔在等离子体激励下的性能与电参数有关，在谐振频率和电场强度为799.5 V/m时，表现最佳的谐振腔(ptfe)的最大实际阻抗为644.3 Ω。该谐振器在等离子体点火实验中表现出最佳的功率效率。该谐振器以0.34 W的射频输入功率点燃了约1 Pa的大气环境放电。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Radioengineering 工程技术-工程：电子与电气

CiteScore

2.00

自引率

9.10%

发文量

审稿时长

5.7 months

期刊介绍： Since 1992, the Radioengineering Journal has been publishing original scientific and engineering papers from the area of wireless communication and application of wireless technologies. The submitted papers are expected to deal with electromagnetics (antennas, propagation, microwaves), signals, circuits, optics and related fields. Each issue of the Radioengineering Journal is started by a feature article. Feature articles are organized by members of the Editorial Board to present the latest development in the selected areas of radio engineering. The Radioengineering Journal makes a maximum effort to publish submitted papers as quickly as possible. The first round of reviews should be completed within two months. Then, authors are expected to improve their manuscript within one month. If substantial changes are recommended and further reviews are requested by the reviewers, the publication time is prolonged.