{"title":"In Situ Deformation of Silicon Cantilever Under Constant Stress as a Function of Temperature","authors":"M. Gan, Yang Zhang, V. Tomar","doi":"10.1115/1.4027877","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":73845,"journal":{"name":"Journal of nanotechnology in engineering and medicine","volume":"33 1","pages":"021004"},"PeriodicalIF":0.0000,"publicationDate":"2014-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1115/1.4027877","citationCount":"10","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of nanotechnology in engineering and medicine","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1115/1.4027877","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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