Hybrid Synergic Methodology to Prepare ALD Honey-Comb Anatase Films

Abstract

Macroporous inorganic structures with high surface-to-volume ratio have been recognized as a centre of interest in many fields. Here, attention is focused on a hybrid synergic methodology to prepare honey-comb (HC) anatase TiO₂ films with increased specific surface area. The breath figures (BFs) method is exploited to produce HC polystyrene (PS) templates and atomic layer deposition (ALD) is used to conformally cover them with a TiO₂ coating. Different approaches are tested to preserve the HC-TiO₂ structure during the conversion of the hybrid organic/inorganic materials into crystalline anatase films. Best results are obtained operating with ALD at 180 °C on pre-UV cross-linked substrates.