{"title":"Effects of Synthesis Parameters on Silicon Nanopowders Produced by CO2 Laser-Driven Pyrolysis of Silane†","authors":"Junli Kong, Xuegeng Li, Pingrong Yu, Dong Wang, Sen Zhang, Ziqi Xu","doi":"10.1002/cvde.201407148","DOIUrl":null,"url":null,"abstract":"<div>\n \n <section>\n \n <p>A well-designed and assembled apparatus for producing silicon nanoparticles by CO<sub>2</sub> laser-driven pyrolysis of SiH<sub>4</sub> is shown. The effects of process parameters (chamber pressure, laser power, gas composition) on the nano-silicon characteristics (average particle size, size distribution and shape) are systematically investigated. The produced silicon nanopowders are characterized and analyzed, demonstrating the produced particles are much smaller and much more uniform in size than the commercial products and those previously reported. The impressive productivity and yield are also discussed. This research allows a better understanding of the influences of processing parameters on silicon nanopowders, shows a controllable way of producing the desired powders, and paves the way to commercialization.</p>\n </section>\n </div>","PeriodicalId":10093,"journal":{"name":"Chemical Vapor Deposition","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2015-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1002/cvde.201407148","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Chemical Vapor Deposition","FirstCategoryId":"1085","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/cvde.201407148","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
A well-designed and assembled apparatus for producing silicon nanoparticles by CO2 laser-driven pyrolysis of SiH4 is shown. The effects of process parameters (chamber pressure, laser power, gas composition) on the nano-silicon characteristics (average particle size, size distribution and shape) are systematically investigated. The produced silicon nanopowders are characterized and analyzed, demonstrating the produced particles are much smaller and much more uniform in size than the commercial products and those previously reported. The impressive productivity and yield are also discussed. This research allows a better understanding of the influences of processing parameters on silicon nanopowders, shows a controllable way of producing the desired powders, and paves the way to commercialization.
期刊介绍：
Chemical Vapor Deposition (CVD) publishes Reviews, Short Communications, and Full Papers on all aspects of chemical vapor deposition and related technologies, along with other articles presenting opinion, news, conference information, and book reviews. All papers are peer-reviewed. The journal provides a unified forum for chemists, physicists, and engineers whose publications on chemical vapor deposition have in the past been spread over journals covering inorganic chemistry, materials chemistry, organometallics, applied physics and semiconductor technology, thin films, and ceramic processing.
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