David J. Mandia, Wenjun Zhou, Jacques Albert, Seán T. Barry
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引用次数: 7
Abstract
The tilted fiber Bragg grating (TFBG), as a versatile and robust tool for many sensing applications with a particular focus on vapor deposition processes, is reviewed. Recent work employing the TFBG as an optical probe for monitoring the metal-organic (MO)CVD of noble-metal, single-source precursors is discussed extensively. This work also establishes the broad scope that utilizes TFBGs and other optical fiber configurations to interrogate thin film growth and the associated optical properties. While it cannot possibly cover the full scope of applications with respect to the TFBG device, this review highlights the recent advances of TFBG-based sensing for CVD, and progress towards the applicability of TFBGs as evanescent field-based sensors.
期刊介绍：
Chemical Vapor Deposition (CVD) publishes Reviews, Short Communications, and Full Papers on all aspects of chemical vapor deposition and related technologies, along with other articles presenting opinion, news, conference information, and book reviews. All papers are peer-reviewed. The journal provides a unified forum for chemists, physicists, and engineers whose publications on chemical vapor deposition have in the past been spread over journals covering inorganic chemistry, materials chemistry, organometallics, applied physics and semiconductor technology, thin films, and ceramic processing.
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