{"title":"Flexible pressure sensor with wide pressure range based on 3D microporous PDMS/MWCNTs for human motion detection","authors":"Chun-Sheng Jiang, Ru-Yue Lv, Yan-Li Zou, Hui-Ling Peng","doi":"10.1016/j.mee.2023.112105","DOIUrl":null,"url":null,"abstract":"<div><p><span><span>Introducing microstructure in the flexible pressure sensors is an effective strategy to enhance the performance of the sensor. Herein, we fabricated a flexible pressure sensor with three-dimensional (3D) miroporous based on a hybrid of </span>polydimethylsiloxane<span> (PDMS) and multiwalled carbon nanotubes (MWCNTs). The 3D microporous was produced by a facile and low-cost process using NH</span></span><sub>4</sub>HCO<sub>3</sub> as a sacrificial template, the NH<sub>4</sub>HCO<sub>3</sub><span> particles were decomposed to gas<span> and left microporous in the hybrid of PDMS and MWCNTs. The microporous structure inside the sensor allowed for a wide pressure range (∼140 kPa). The sensor could detect large motions of finger, wrist, elbow, knee, and even small motion such as facial expression. In addition, a 3 × 3 tactile sensor<span> array was successfully applied in the pressure distribution of fingers to grasp a cup. The results demonstrate that the sensor is promising application in wearable electronics and human-machine interfaces for pressure sensing.</span></span></span></p></div>","PeriodicalId":18557,"journal":{"name":"Microelectronic Engineering","volume":null,"pages":null},"PeriodicalIF":2.6000,"publicationDate":"2023-10-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronic Engineering","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0167931723001703","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
Introducing microstructure in the flexible pressure sensors is an effective strategy to enhance the performance of the sensor. Herein, we fabricated a flexible pressure sensor with three-dimensional (3D) miroporous based on a hybrid of polydimethylsiloxane (PDMS) and multiwalled carbon nanotubes (MWCNTs). The 3D microporous was produced by a facile and low-cost process using NH4HCO3 as a sacrificial template, the NH4HCO3 particles were decomposed to gas and left microporous in the hybrid of PDMS and MWCNTs. The microporous structure inside the sensor allowed for a wide pressure range (∼140 kPa). The sensor could detect large motions of finger, wrist, elbow, knee, and even small motion such as facial expression. In addition, a 3 × 3 tactile sensor array was successfully applied in the pressure distribution of fingers to grasp a cup. The results demonstrate that the sensor is promising application in wearable electronics and human-machine interfaces for pressure sensing.
期刊介绍:
Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.