Preventing oxide precipitation in selective wet etching of Si3N4 for 3D-NAND structure fabrication: The role of bubbles

Abstract

Selective wet etching of ${\mathrm{Si}}_3{N}_4$ is a critical process in the fabrication of 3D-NAND structures; however, it faces a oxide precipitation problem that significantly deteriorates the remaining structure morphology. A recent study by Kim et al.(Kim et al., 2022 [1]⁾ showed that generating CO₂ bubbles during the wet etching process efficiently solves the precipitation problem in the fabrication of a 128 multi-layer 3D-NAND structure. In this study, we numerically investigated the multiscale diffusive transport of oxides in the etching process via three different simplified simulations at different scales to reveal the underlying mechanism. We found that mass transport within the multilayer structures alone cannot contribute to the oxide precipitation behavior. Macroscopic transport from the wafer-etchant interface to the bulk must be considered since it contributes to a high oxide concentration at the wafer-etchant surface, which further increases the concentration within the trenches, leading to the precipitation problem. Through the conjecture oxide transport simulation, we found that the large bubbles generated from the reaction agitate the surrounding liquid and dramatically reduce the oxide concentration at the wafer-etchant surface by one order of magnitude, thereby solving the precipitation problem. Our findings clearly explain the experimental results reported by Kim et al. and will further benefit the development of process-intensification technologies in wet etching.