High-rate laser processing with ultrashort laser pulses by combination of diffractive elements with synchronized galvo scanning

IF 2.3 Q2 OPTICS

Advanced Optical Technologies Pub Date : 2021-10-25 DOI:10.1515/aot-2021-0035

M. Gafner, S. Remund, M. Chaja, B. Neuenschwander

引用次数: 6

Abstract

Abstract The combination of diffractive optical elements or spatial light modulators with fully synchronized galvo scanners offers a possibility to scale up machining processes with ultra-short pulses to several 100 W of average power with minimal thermal impact. This will be demonstrated with the high-rate applications multi-pulse drilling on the fly and material removal with special intensity distributions up to an average power of 162 W and a removal rate of 16.5 mm3/min. Based on the experimental results strategies to achieve drilling rates of several 10,000 holes/s or removal rates of multiple 10 mm3/min will be discussed.

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衍射元件与同步激振扫描相结合的超短激光脉冲高速激光加工

衍射光学元件或空间光调制器与完全同步的galvo扫描仪的组合为将超短脉冲的加工过程扩展到平均功率为100 W的加工过程提供了可能，同时热影响最小。这将通过高速率多脉冲钻井和特殊强度分布的材料去除来证明，平均功率高达162 W，去除率为16.5 mm3/min。根据实验结果，将讨论实现数万孔/s的钻井速率或10 mm3/min以上的去除速率的策略。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Advanced Optical Technologies OPTICS-

CiteScore

4.40

自引率

0.00%

发文量

期刊介绍： Advanced Optical Technologies is a strictly peer-reviewed scientific journal. The major aim of Advanced Optical Technologies is to publish recent progress in the fields of optical design, optical engineering, and optical manufacturing. Advanced Optical Technologies has a main focus on applied research and addresses scientists as well as experts in industrial research and development. Advanced Optical Technologies partners with the European Optical Society (EOS). All its 4.500+ members have free online access to the journal through their EOS member account. Topics: Optical design, Lithography, Opto-mechanical engineering, Illumination and lighting technology, Precision fabrication, Image sensor devices, Optical materials (polymer based, inorganic, crystalline/amorphous), Optical instruments in life science (biology, medicine, laboratories), Optical metrology, Optics in aerospace/defense, Simulation, interdisciplinary, Optics for astronomy, Standards, Consumer optics, Optical coatings.