Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a‐C:H:Ti/a‐C:H friction pairs

IF 2.7 4区化学 Q4 CHEMISTRY, PHYSICAL

Surface and Interface Analysis Pub Date : 2022-04-28 DOI:10.1002/sia.7106

Xinyu Wen, Zhenguo Lai, Bin Zhang, Xin Wang, Yuanhong Wang, Kaixiong Gao, Caihong Tao

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引用次数: 1

Abstract

In this study, we prepared a‐C:H films with different nanostructures at different methane flow rates. The effect of the methane flow rate on the tribological properties of 440 steel/a‐C:H friction pairs and a‐C:H:Ti/a‐C:H friction pairs in an atmospheric environment was studied by a reciprocating friction machine. The results show that there is no relationship between the tribological properties of 440 steel/a‐C:H friction pair and methane flow rate. The tribological performance of the a‐C:H:Ti/a‐C:H friction pair was greatly improved. In particular, in the friction pair of a‐C:H:Ti/a‐C:H with a methane flow rate of 20 sccm, superlubricity is shown, and the wear rate is only 4.04 × 10−9 mm3/Nm. After tribological experiments, Raman spectroscopy, XPS, and other characterization methods were used to study the relationship between the nanostructure and tribological properties of a‐C:H:Ti films and a‐C:H prepared with different methane flow rates. This study is great significance to the application of a‐C:H:Ti/a‐C:H friction pair in mechanical parts under atmospheric environment.

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甲烷对磁控溅射石墨靶沉积膜及a‐C:H:Ti/a‐C:H摩擦副摩擦学性能的影响

在本研究中，我们在不同的甲烷流速下制备了具有不同纳米结构的a‐C:H薄膜。采用往动式摩擦试验机，研究了大气环境下甲烷流量对440钢/a‐C:H摩擦副和a‐C:H:Ti/a‐C:H摩擦副摩擦学性能的影响。结果表明，440钢/a‐C:H摩擦副的摩擦学性能与甲烷流量无关。a‐C:H:Ti/a‐C:H摩擦副的摩擦学性能得到了很大的改善。特别是当甲烷流量为20 sccm时，a‐C:H:Ti/a‐C:H的摩擦副表现出超润滑性，磨损率仅为4.04 × 10−9 mm3/Nm。通过摩擦学实验，利用拉曼光谱、XPS等表征方法研究了不同甲烷流速制备的a‐C:H:Ti薄膜和a‐C:H薄膜的纳米结构与摩擦学性能的关系。本研究对a‐C:H:Ti/a‐C:H摩擦副在大气环境下机械零件的应用具有重要意义。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Surface and Interface Analysis 化学-物理化学

CiteScore

3.30

自引率

5.90%

发文量

130

审稿时长

4.4 months

期刊介绍： Surface and Interface Analysis is devoted to the publication of papers dealing with the development and application of techniques for the characterization of surfaces, interfaces and thin films. Papers dealing with standardization and quantification are particularly welcome, and also those which deal with the application of these techniques to industrial problems. Papers dealing with the purely theoretical aspects of the technique will also be considered. Review articles will be published; prior consultation with one of the Editors is advised in these cases. Papers must clearly be of scientific value in the field and will be submitted to two independent referees. Contributions must be in English and must not have been published elsewhere, and authors must agree not to communicate the same material for publication to any other journal. Authors are invited to submit their papers for publication to John Watts (UK only), Jose Sanz (Rest of Europe), John T. Grant (all non-European countries, except Japan) or R. Shimizu (Japan only).