Laser interference ablation by ultrashort UV laser pulses via diffractive beam management

IF 2.3 Q2 OPTICS

Advanced Optical Technologies Pub Date : 2020-02-01 DOI:10.1515/aot-2019-0068

J. Klein-Wiele, A. Blumenstein, P. Simon, J. Ihlemann

引用次数: 8

Abstract

Abstract The fabrication of periodic surface patterns on various materials by ultrashort ultraviolet (UV) laser pulses is reviewed. Laser interference ablation using two or more coherent beams leads to deterministic, strictly periodic patterns. The generation of the interfering beams is accomplished by diffractive optical elements like gratings, grating systems or computer-generated holograms. The recombination of the diffracted beams is performed by optical imaging or diffractive beam management. Ultrashort UV pulses are especially suited for generating micron- to submicron-sized deterministic periodic patterns on metals and semiconductors.

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利用衍射光束管理实现超短紫外激光脉冲的激光干涉烧蚀

摘要综述了利用超短紫外激光脉冲在各种材料上制备周期性表面图案的方法。使用两个或多个相干光束的激光干涉烧蚀导致确定性的、严格的周期性图案。干涉光束的产生是通过衍射光学元件如光栅、光栅系统或计算机生成的全息图来实现的。衍射光束的复合通过光学成像或衍射光束管理来执行。超短紫外线脉冲特别适合在金属和半导体上产生微米到亚微米大小的确定周期性图案。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Advanced Optical Technologies OPTICS-

CiteScore

4.40

自引率

0.00%

发文量

期刊介绍： Advanced Optical Technologies is a strictly peer-reviewed scientific journal. The major aim of Advanced Optical Technologies is to publish recent progress in the fields of optical design, optical engineering, and optical manufacturing. Advanced Optical Technologies has a main focus on applied research and addresses scientists as well as experts in industrial research and development. Advanced Optical Technologies partners with the European Optical Society (EOS). All its 4.500+ members have free online access to the journal through their EOS member account. Topics: Optical design, Lithography, Opto-mechanical engineering, Illumination and lighting technology, Precision fabrication, Image sensor devices, Optical materials (polymer based, inorganic, crystalline/amorphous), Optical instruments in life science (biology, medicine, laboratories), Optical metrology, Optics in aerospace/defense, Simulation, interdisciplinary, Optics for astronomy, Standards, Consumer optics, Optical coatings.