Surface analysis insight note: Straightforward concentration depth profiling by angle‐resolved X‐ray photoelectron spectroscopy using a Tikhonov regularization algorithm

IF 1.6 4区化学 Q4 CHEMISTRY, PHYSICAL

Surface and Interface Analysis Pub Date : 2023-06-01 DOI:10.1002/sia.7240

B. Murdoch, D. McCulloch

引用次数: 1

Abstract

Angle‐resolved X‐ray photoelectron spectroscopy (ARXPS) is a technique used for depth‐dependent analysis in the near‐surface region of samples. Calculation of a concentration depth profile using ARXPS requires an inverse Laplace transform, which adds considerable complexity to the analysis. In this insight note, the Tikhonov regularization algorithm for depth profile reconstruction from ARXPS data is examined. The steps required to produce a concentration depth profile are provided. The discussion includes strategies that deal with elastic scattering, electron attenuation, choice of regularization terms and optimization of the regularization parameters. The method is implemented in a Microsoft Excel spreadsheet that allows users to calculate a depth profile for data collected at up to five angles for five different peak components.

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表面分析洞察注:使用Tikhonov正则化算法，通过角分辨X射线光电子能谱直接进行浓度深度分析

角分辨X射线光电子能谱（ARXPS）是一种用于样品近表面区域深度相关分析的技术。使用ARXPS计算浓度深度分布需要进行拉普拉斯逆变换，这给分析增加了相当大的复杂性。在本文中，研究了从ARXPS数据重建深度剖面的Tikhonov正则化算法。提供了产生浓度深度分布所需的步骤。讨论包括处理弹性散射、电子衰减、正则化项的选择和正则化参数的优化的策略。该方法在Microsoft Excel电子表格中实现，用户可以为在五个不同峰值分量的五个角度收集的数据计算深度剖面。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Surface and Interface Analysis 化学-物理化学

CiteScore

3.30

自引率

5.90%

发文量

130

审稿时长

4.4 months

期刊介绍： Surface and Interface Analysis is devoted to the publication of papers dealing with the development and application of techniques for the characterization of surfaces, interfaces and thin films. Papers dealing with standardization and quantification are particularly welcome, and also those which deal with the application of these techniques to industrial problems. Papers dealing with the purely theoretical aspects of the technique will also be considered. Review articles will be published; prior consultation with one of the Editors is advised in these cases. Papers must clearly be of scientific value in the field and will be submitted to two independent referees. Contributions must be in English and must not have been published elsewhere, and authors must agree not to communicate the same material for publication to any other journal. Authors are invited to submit their papers for publication to John Watts (UK only), Jose Sanz (Rest of Europe), John T. Grant (all non-European countries, except Japan) or R. Shimizu (Japan only).