Investigation of the influence of the features of the deposition process on the structural features of microparticles in PVD coatings

IF 4.3 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum Pub Date : 2022-08-01 Epub Date: 2022-05-06 DOI:10.1016/j.vacuum.2022.111144

Sergey Grigoriev , Alexey Vereschaka , Vsevolod Zelenkov , Nikolay Sitnikov , Jury Bublikov , Filipp Milovich , Nikolay Andreev , Catherine Sotova

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引用次数: 26

Abstract

The article discusses the specifics of the formation of the coating structure when the vacuum arc evaporator with controlled accelerated motion of a cathode spot of Arc-PVD (CAA-PVD) is used. The article also presents the results of the studies focused on the relationship between the shape and the crystalline structure of the microparticles formed during the coating deposition process and the spatial arrangement of a sample in the chamber of the unit. The influence of the structure of the contact zone between a microparticle and the substrate surface on the crystalline structure of a microparticle was analyzed. The conducted experiments detected the relationship between a solidified microparticle and its initial size. The studies focused on the phase composition of microparticles confirmed a hypothesis on the formation of a nitride shell around a metallic core.

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研究沉积工艺特征对PVD涂层中微粒结构特征的影响

本文讨论了电弧- pvd (CAA-PVD)阴极点可控加速运动真空电弧蒸发器(CAA-PVD)镀膜结构形成的具体情况。本文还介绍了涂层沉积过程中形成的微粒的形状和晶体结构与样品在单元腔室中的空间排列之间关系的研究结果。分析了微粒与衬底表面接触区结构对微粒结晶结构的影响。所进行的实验检测了凝固微粒与其初始尺寸之间的关系。这些研究集中在微粒的相组成上，证实了在金属核周围形成氮化物壳的假设。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Vacuum 工程技术-材料科学：综合

CiteScore

6.80

自引率

17.50%

发文量

审稿时长

34 days

期刊介绍： Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.