MEMS particle sensor based on resonant frequency shifting

Abstract

Recently, as the concentration of fine dust in the atmosphere has increased due to an increase in the use of fossil fuel power plants, automobiles, and factories, it has been increasingly important to measure fine dust in the atmosphere. This is because exposure to fine dust is closely related to the incidence of respiratory and cardiovascular diseases and eventually affects mortality. In this paper, we introduce a MEMS particle sensor based on the resonance frequency shift according to added particle mass. The actuation is driven by Aluminum nitride (AlN), and the total thickness is 2.8?μm. A laser doppler vibrometer (LDV), an optical measuring instrument, was used to measure the resonance frequency of the sensor. Airborne particles naturally were deposited on the sensor. To show the frequency shift according to the particle mass, the frequency shift was measured by dividing the case where the deposited particle mass was small and large. In each case, the frequency shift according to the deposited particle mass was predicted and compared with the frequency shift measured by LDV. It was shown that the deposited particle mass and frequency shift are proportional. The deposition of particulate mass was estimated by image analysis. The frequency shift caused by the particle mass deposited on the sensor was defined as the sensitivity of the sensor. The estimated sensitivity of the sensor is 0.219 to 0.354?kHz/pg.