Study on gas trapping during precision glass molding of microlens array in a nitrogen atmosphere

IF 2.1 3区材料科学 Q2 MATERIALS SCIENCE, CERAMICS

International Journal of Applied Glass Science Pub Date : 2023-01-19 DOI:10.1111/ijag.16624

Tianfeng Zhou, Zihao Zeng, Qian Yu, Jia Zhou, Peng Liu, Xibin Wang

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引用次数: 3

Abstract

Microlens arrays will suffer from filling defects due to trapped gas when molded in a nitrogen atmosphere by precision glass molding (PGM). In this paper, a multistep molding method is proposed to avoid gas trapping and improve the accuracy of a microlens array. The defect formation mechanism of the microlens array caused by the trapped gas is investigated, and the effect of the molding pressure on the defect formation is analyzed. A numerical model of the mold-nitrogen-glass interface at high temperature is established to evaluate the defect evolution, and the minimum number of PGM steps required to greatly reduce defects caused by the trapped gas is predicted. The numerical model is validated by a multistep PGM experiment of D-K59 glass material. The results show that a three-step PGM process significantly reduced the height of the defect. The difference between the height of the microlens unit and the depth of the mold is less than 0.4%. The molded microlens array has a peak-to-valley value of 0.38 μm and a surface roughness Ra of 3.5 nm. This work is instructive for the fabrication of high-precision glass microlens arrays.

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氮气氛下微透镜阵列精密玻璃成型过程中的气体捕获研究

微透镜阵列在氮气环境中采用精密玻璃模压成型(PGM)时，会因困住气体而产生填充缺陷。本文提出了一种多步成型方法，以避免气体捕获，提高微透镜阵列的精度。研究了困气对微透镜阵列缺陷形成的机理，分析了成型压力对缺陷形成的影响。建立了高温下模具-氮-玻璃界面的数值模型，对缺陷演化过程进行了评价，并预测了能大大减少被捕获气体引起的缺陷所需的最小PGM步骤数。通过D-K59玻璃材料的多步PGM实验验证了数值模型的有效性。结果表明，三步PGM工艺显著降低了缺陷的高度。微透镜单元高度与模具深度的差值小于0.4%。模制微透镜阵列的峰谷值为0.38 μm，表面粗糙度Ra为3.5 nm。该工作对高精度玻璃微透镜阵列的制作具有指导意义。

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来源期刊

International Journal of Applied Glass Science MATERIALS SCIENCE, CERAMICS-

CiteScore

4.50

自引率

9.50%

发文量

审稿时长

>12 weeks

期刊介绍： The International Journal of Applied Glass Science (IJAGS) endeavors to be an indispensable source of information dealing with the application of glass science and engineering across the entire materials spectrum. Through the solicitation, editing, and publishing of cutting-edge peer-reviewed papers, IJAGS will be a highly respected and enduring chronicle of major advances in applied glass science throughout this century. It will be of critical value to the work of scientists, engineers, educators, students, and organizations involved in the research, manufacture and utilization of the material glass. Guided by an International Advisory Board, IJAGS will focus on topical issue themes that broadly encompass the advanced description, application, modeling, manufacture, and experimental investigation of glass.