Electrostatic Energy Harvesting of Kinetic Motions Using a MEMS Device and a Bennet Doubler Conditioning Circuit

IF 1.6 4区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Instrumentation & Measurement Magazine Pub Date : 2023-05-01 DOI:10.1109/MIM.2023.10121408

A. Alneamy, H. Samaali, F. Najar

{"title":"Electrostatic Energy Harvesting of Kinetic Motions Using a MEMS Device and a Bennet Doubler Conditioning Circuit","authors":"A. Alneamy, H. Samaali, F. Najar","doi":"10.1109/MIM.2023.10121408","DOIUrl":null,"url":null,"abstract":"This work is concerned with the design of a microelectromechanical system (MEMS) device that can harvest kinetic energy from its environment using only classical microfabrication techniques. The device is composed of a cantilever beam, where a proof mass is linked to its tip in order to tune the natural frequency of the device. Two stationary electrodes are standing side by side with the cantilever beam to form two out-of-phase variable capacitances with a rotary interdigitated design suitable for flexural bending motions. A Bennet doubler is implemented as a conditioning circuit while taking advantage of the variable capacitances to harvest the kinetic energy of the beam. Finite element modeling is used to estimate the variation of the capacitance and deduce an analytical model from the results. For the dynamic response, a reduced-order model based on a single-mode projection is derived and numerically solved, from the equation of motion of the beam. The response of the system depicts a clear benefit regarding the harvested energy kept in a storage capacitance.","PeriodicalId":55025,"journal":{"name":"IEEE Instrumentation & Measurement Magazine","volume":"26 1","pages":"14-20"},"PeriodicalIF":1.6000,"publicationDate":"2023-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Instrumentation & Measurement Magazine","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1109/MIM.2023.10121408","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

Abstract

This work is concerned with the design of a microelectromechanical system (MEMS) device that can harvest kinetic energy from its environment using only classical microfabrication techniques. The device is composed of a cantilever beam, where a proof mass is linked to its tip in order to tune the natural frequency of the device. Two stationary electrodes are standing side by side with the cantilever beam to form two out-of-phase variable capacitances with a rotary interdigitated design suitable for flexural bending motions. A Bennet doubler is implemented as a conditioning circuit while taking advantage of the variable capacitances to harvest the kinetic energy of the beam. Finite element modeling is used to estimate the variation of the capacitance and deduce an analytical model from the results. For the dynamic response, a reduced-order model based on a single-mode projection is derived and numerically solved, from the equation of motion of the beam. The response of the system depicts a clear benefit regarding the harvested energy kept in a storage capacitance.

查看原文本刊更多论文

利用MEMS器件和Bennet双调节电路实现运动的静电能量采集

这项工作涉及微机电系统（MEMS）设备的设计，该设备可以仅使用经典的微制造技术从其环境中获取动能。该装置由悬臂梁组成，在悬臂梁的尖端连接一个检验质量块，以调节装置的固有频率。两个固定电极与悬臂梁并排放置，以形成两个异相可变电容，该电容具有适用于弯曲弯曲运动的旋转叉指状设计。Bennet倍频器被实现为一个调节电路，同时利用可变电容来获取光束的动能。有限元建模用于估计电容的变化，并根据结果推导出分析模型。对于动力响应，根据梁的运动方程，导出了基于单模投影的降阶模型，并对其进行了数值求解。该系统的响应描绘了关于保持在存储电容中的收获能量的明显益处。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

IEEE Instrumentation & Measurement Magazine 工程技术-工程：电子与电气

CiteScore

4.20

自引率

4.80%

发文量

147

审稿时长

>12 weeks

期刊介绍： IEEE Instrumentation & Measurement Magazine is a bimonthly publication. It publishes in February, April, June, August, October, and December of each year. The magazine covers a wide variety of topics in instrumentation, measurement, and systems that measure or instrument equipment or other systems. The magazine has the goal of providing readable introductions and overviews of technology in instrumentation and measurement to a wide engineering audience. It does this through articles, tutorials, columns, and departments. Its goal is to cross disciplines to encourage further research and development in instrumentation and measurement.