Equipment for in situ measurement of machining defects of large aperture optical elements

IF 2.1 3区材料科学 Q2 MATERIALS SCIENCE, CERAMICS

International Journal of Applied Glass Science Pub Date : 2022-06-08 DOI:10.1111/ijag.16593

Guipeng Tie, Haifeng Zhou, Feng Shi, Jian Chen, Shuo Qiao, Ye Tian, Ci Song

引用次数: 0

Abstract

A set of in situ measurement equipment of large aperture strong light element based on the principle of laser scattering is established. The size and distribution of defects (damage points) can be judged by the laser scattering signal. The maximum scanning range is 700 mm*1000 mm. The type and size of defects are directly obtained by scanning the quartz sample with a diameter of 100 mm. The types of defects are pitting and scratches, and the width of the scratches and the diameter of the pitting are mostly in the range of 0–10μm. The processing time could reach 31.06s. The device can realize the on-line in situ measurement of large aperture optical elements, and has the advantages of fast response speed and high measurement accuracy.

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大口径光学元件加工缺陷原位测量设备

建立了一套基于激光散射原理的大孔径强光元件原位测量装置。利用激光散射信号可以判断缺陷(损伤点)的大小和分布。最大扫描范围为700mm * 1000mm。通过对直径为100mm的石英试样进行扫描，直接得到缺陷的类型和尺寸。缺陷类型为点蚀和划痕，划痕宽度和点蚀直径多在0 ~ 10μm范围内。处理时间可达31.06s。该装置可实现对大口径光学元件的在线原位测量，具有响应速度快、测量精度高等优点。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Journal of Applied Glass Science MATERIALS SCIENCE, CERAMICS-

CiteScore

4.50

自引率

9.50%

发文量

审稿时长

>12 weeks

期刊介绍： The International Journal of Applied Glass Science (IJAGS) endeavors to be an indispensable source of information dealing with the application of glass science and engineering across the entire materials spectrum. Through the solicitation, editing, and publishing of cutting-edge peer-reviewed papers, IJAGS will be a highly respected and enduring chronicle of major advances in applied glass science throughout this century. It will be of critical value to the work of scientists, engineers, educators, students, and organizations involved in the research, manufacture and utilization of the material glass. Guided by an International Advisory Board, IJAGS will focus on topical issue themes that broadly encompass the advanced description, application, modeling, manufacture, and experimental investigation of glass.