Recent Advances in Femtosecond Laser Fabrication: From Structures to Applications

IF 1.8 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY
Yangdong Wen;Haibo Yu;Yuzhao Zhang;Ye Qiu;Peiwen Li;Xiaoduo Wang;Boliang Jia;Lianqing Liu;Wen Jung Li
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引用次数: 1

Abstract

Femtosecond laser processing is fast becoming a pervasive method for fabricating micro/nanostructures because it can be used to produce micro/nanostructures on myriads of materials with high precision and resolution, requires little control over environmental conditions, and is simple to implement. Here, we review recent developments in the use of femtosecond lasers for the fabrication of micro/nanostructures through ablation and two-photon polymerization (TPP). Moreover, the applications of some of the fabricated micro/nanostructures are also discussed. We highlight the advantages of femtosecond laser processing by explaining the underlying principles of laser ablation and TPP. We also show the use of this method to fabricate new devices with outstanding performance in several application realm, such as sensors, optical devices, microfluidic chips, and soft robotics.
飞秒激光制造的最新进展:从结构到应用
飞秒激光加工技术正迅速成为一种普遍的微纳米结构制造方法,因为它可以在无数种材料上以高精度和高分辨率制造微纳米结构,对环境条件的控制很少,并且易于实现。在这里,我们回顾了飞秒激光通过烧蚀和双光子聚合(TPP)制造微/纳米结构的最新进展。此外,还讨论了所制备的微纳结构的应用。我们通过解释激光烧蚀和TPP的基本原理来强调飞秒激光加工的优势。我们还展示了使用这种方法在传感器、光学器件、微流控芯片和软机器人等多个应用领域制造性能优异的新器件。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
CiteScore
3.90
自引率
17.60%
发文量
10
审稿时长
12 weeks
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