Aerosol deposition of dense lead zirconate titanate thin films at room temperature

Abstract

Lead zirconate titanate (Pb(Zr,Ti)O₃, PZT) films were grown on silicon 〈1 0 0〉 substrate by aerosol deposition, using solid-state reacted powder containing donor oxide Nb₂O₅, while the substrate was maintained at room temperature. The PZT films were simultaneously sintered upon deposition on a highly densified ceramic layer. Crystalline phases of the deposited films have been determined by X-ray diffractometry (XRD), and microstructures analysed by transmission electron microscopy (TEM). The cross-section microstructure consisted of several thin layers, including the PZT film and the platinum electrode and titanium-buffered layers on the substrate. High-resolution images revealed that the PZT layer contained a mixture of randomly oriented grains of nanometre size, which were embedded in an amorphous matrix. In contrast to the conventional liquid-phase sintering mechanism, sintering of the PZT films involved amorphised phases generated by pressure-induced amorphisation (PIA) from plastic deformation when the initial powder particles collided amongst one another upon reaching the silicon substrate during aerosol deposition. An analogy may be drawn to the impact of extraterrestrial meteorites in which diaplectic glass, i.e., amorphised phase, was formed and retained metastably at room temperature. The individual PZT grains were joined with the amorphised phase(s) and sintered to become a dense, thin film on the silicon substrate.