Diamond epitaxy: Basics and applications

IF 4.5 2区材料科学 Q1 CRYSTALLOGRAPHY

Progress in Crystal Growth and Characterization of Materials Pub Date : 2016-06-01 DOI:10.1016/j.pcrysgrow.2016.04.017

Makoto Kasu

引用次数: 26

Abstract

Diamond has been used as cutting tools, and also has recently attracted extensive attention as a semiconductor. In the review, its properties and prospects of its electronic devices are shown. Then, principles of crystal growth methods, such as high-pressure, high-temperature (HPHT) and chemical vapor deposition (CVD) methods, are described. Next, current understanding of defects such as dislocations and stacking faults is described. Further, for the future electronic applications, the present status of wafer technology and impurity doping are described. Finally, the electronic devices made of diamond semiconductors are shown.

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金刚石外延:基础和应用

金刚石被用作切削工具，最近也作为半导体引起了广泛的关注。综述了其性质，并展望了其在电子器件中的应用前景。然后，介绍了高压、高温(HPHT)和化学气相沉积(CVD)等晶体生长方法的原理。接下来，描述了当前对位错和层错等缺陷的理解。此外，对于未来的电子应用，描述了晶片技术和杂质掺杂的现状。最后，展示了由金刚石半导体制成的电子器件。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Progress in Crystal Growth and Characterization of Materials 工程技术-材料科学：表征与测试

CiteScore

8.80

自引率

2.00%

发文量

审稿时长

1 day

期刊介绍： Materials especially crystalline materials provide the foundation of our modern technologically driven world. The domination of materials is achieved through detailed scientific research. Advances in the techniques of growing and assessing ever more perfect crystals of a wide range of materials lie at the roots of much of today''s advanced technology. The evolution and development of crystalline materials involves research by dedicated scientists in academia as well as industry involving a broad field of disciplines including biology, chemistry, physics, material sciences and engineering. Crucially important applications in information technology, photonics, energy storage and harvesting, environmental protection, medicine and food production require a deep understanding of and control of crystal growth. This can involve suitable growth methods and material characterization from the bulk down to the nano-scale.