Fundamentals and Applications of High Angular Resolution EBSD in Metallic Materials

IF 4.5 3区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Metals and Materials International Pub Date : 2026-06-05 DOI:10.1007/s12540-025-02187-0

Sumaira Sadiq, Dain Choi, Tae-Yang Kwak, Tae-Jin Lee, Tea-Sung Jun

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引用次数: 0

Abstract

High angular resolution electron backscatter diffraction (HR-EBSD) represents a significant advancement over conventional EBSD, offering two orders of magnitude greater precision in measuring lattice strain and rotation. By replacing the Hough transform with a robust cross-correlation analysis of Kikuchi diffraction patterns, HR-EBSD achieves an angular resolution of approximately 0.0001 radians. This enhanced sensitivity enables the direct quantification of the elastic deformation gradient tensor, which can be decomposed to map residual stress fields with a precision of ~ 20 MPa and geometrically necessary dislocation (GND) densities with a noise floor as low as 10¹²/m². This article reviews the fundamental principles of HR-EBSD, highlighting its key distinctions from conventional EBSD. It further explores its primary applications in metallic materials, including the detailed characterization of GND structures, the measurement of micro-scale residual stresses for fracture mechanics. Practical challenges and the theoretical underpinnings of strain and dislocation analysis are also discussed, establishing HR-EBSD as an indispensable tool for linking microstructural features to macroscopic mechanical behavior.

Graphical Abstract

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高角分辨EBSD在金属材料中的基本原理及应用

高角分辨率电子背散射衍射（HR-EBSD）是传统电子背散射衍射的重要进步，在测量晶格应变和旋转方面提供了两个数量级的精度。通过用Kikuchi衍射图样的鲁棒互相关分析取代霍夫变换，HR-EBSD实现了约0.0001弧度的角分辨率。这种增强的灵敏度使弹性变形梯度张量能够直接量化，可以将其分解为精度为~ 20 MPa的残余应力场和噪声底低至1012/m2的几何必要位错（GND）密度。本文回顾了HR-EBSD的基本原理，强调了它与传统EBSD的主要区别。进一步探讨了其在金属材料中的主要应用，包括GND结构的详细表征，断裂力学的微尺度残余应力测量。本文还讨论了应变和位错分析的实践挑战和理论基础，建立了HR-EBSD作为连接微观结构特征和宏观力学行为的不可或缺的工具。图形抽象

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Metals and Materials International 工程技术-材料科学：综合

CiteScore

7.10

自引率

8.60%

发文量

197

审稿时长

3.7 months

期刊介绍： Metals and Materials International publishes original papers and occasional critical reviews on all aspects of research and technology in materials engineering: physical metallurgy, materials science, and processing of metals and other materials. Emphasis is placed on those aspects of the science of materials that are concerned with the relationships among the processing, structure and properties (mechanical, chemical, electrical, electrochemical, magnetic and optical) of materials. Aspects of processing include the melting, casting, and fabrication with the thermodynamics, kinetics and modeling.