Highly sensitive and high Q-factor photonic crystals serially coupled hexagonal resonator for pressure sensing

Abstract

The work explores an SOI-based pressure sensor that operates up to a maximum pressure of 12 MPa and is modeled and analyzed using the finite element method and the finite difference time domain Method. The structure consists of a serially coupled double hexagonal ring between the two straight waveguides. This sensor operates on the photo-elastic effect principle and achieves a minimum detectable pressure of 0.00253 MPa, with a maximum Q-factor of 52,224 observed at 1649 nm wavelength, a sensitivity of 11.825 nm/MPa, and a linear response in output characteristics over 0 to 12 MPa pressure range.