Amorphous boron nitride as a low-k dielectric for next-generation BEOL interconnects

IF 13.8 2区材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY

Nano Convergence Pub Date : 2026-10-01 DOI:10.1186/s40580-026-00579-5

Jong Won Baek, Ju-Hyun Jung, Hyeong-Seok Kim, Junho Kim, Dong-Hyun Kim, Jangyup Son, Sangyul Ha

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Abstract

As back-end-of-line (BEOL) scaling pushes porous low-k dielectrics toward their reliability limits, nonporous dielectrics that combine a low dielectric constant (k) with mechanical, thermal, and interfacial robustness are increasingly needed. Among nonporous low-k candidates, amorphous boron nitride (aBN) has attracted attention for advanced BEOL interconnects owing to its low-k value (k ≈ 2) and high mechanical robustness, as reflected by a Young’s modulus of ~50 GPa. In this review, we discuss aBN from a BEOL process-integration perspective, focusing on the origin of its low-k behavior, process-dependent structure–property relationships, and its potential roles in BEOL interconnects and hybrid-bonding interfaces. Finally, we discuss remaining issues and future directions for validating aBN as a nonporous low-k dielectric/interface material under BEOL and hybrid-bonding integration.

Graphical abstract

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非晶态氮化硼作为下一代BEOL互连的低k介电材料。

随着后端线（BEOL）的扩展将多孔低介电常数(k)推向其可靠性极限，将低介电常数(k)与机械、热学和界面稳健性相结合的非多孔介电材料的需求日益增加。在非多孔低k候选材料中，非晶态氮化硼（aBN）由于其低k值（k≈2）和高机械鲁棒性（杨氏模量为~50 GPa）而引起了人们对先进BEOL互连的关注。在这篇综述中，我们从BEOL工艺集成的角度讨论了aBN，重点关注其低k行为的起源，工艺依赖的结构-性质关系，以及它在BEOL互连和混合键接口中的潜在作用。最后，我们讨论了在BEOL和杂化键集成下验证aBN作为无孔低k介电/界面材料的剩余问题和未来方向。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nano Convergence Engineering-General Engineering

CiteScore

15.90

自引率

2.60%

发文量

审稿时长

13 weeks

期刊介绍： Nano Convergence is an internationally recognized, peer-reviewed, and interdisciplinary journal designed to foster effective communication among scientists spanning diverse research areas closely aligned with nanoscience and nanotechnology. Dedicated to encouraging the convergence of technologies across the nano- to microscopic scale, the journal aims to unveil novel scientific domains and cultivate fresh research prospects. Operating on a single-blind peer-review system, Nano Convergence ensures transparency in the review process, with reviewers cognizant of authors' names and affiliations while maintaining anonymity in the feedback provided to authors.