A Thermal Convection Tilt Sensor With Synergistic Thermal Control and Adaptive Filtering for Long-Term Drift Suppression

IF 3.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Tingfeng Peng;Mengqi Zheng;Yixuan Zhang;Yuan Wang;Michael Kraft;Huahuang Luo
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引用次数: 0

Abstract

This paper presents a thermal convection tilt sensor with synergistic thermal control and adaptive filtering for long-term drift suppression. Experimental investigations reveal that the baseline drift of the sensor primarily originates from the instability of the internally generated thermal convection field. To address this limitation, a closed-loop temperature control (CTC) circuit is developed to actively regulate the microheater through continuous negative feedback, stabilizing the thermal excitation source and reducing the temperature-induced drift by approximately 90%. Based on this source-level stabilization, a three-mode adaptive fusion filter is proposed to further suppress residual ultra-low-frequency baseline wander and high-frequency noise, achieving an additional 70% reduction in fluctuation amplitude while preserving the dynamic step response. Together, the two complementary mechanisms establish a unified stabilization framework across both physical and signal domains, which achieves a minimum detectable angle (MDA) of 0.0698° and an output standard deviation of 0.601 mV. Allan deviation analysis further confirms the substantial improvements in long-term stability, with the acceleration random walk (ARW) reduced to $2.399\times 10 ^{-7\circ }$ / $\surd $ Hz and the bias instability (BI) reduced to $5.317\times 10 ^{\mathrm {-9}\circ }$ . These results demonstrate that the proposed dual-stage stabilization framework provides an effective solution for achieving highly stable thermal convection tilt sensing in precision measurement applications.[2026-0102]
一种具有协同热控制和自适应滤波的热对流倾角传感器,用于长期漂移抑制
本文提出了一种具有协同热控制和自适应滤波的热对流倾斜传感器,用于长期漂移抑制。实验研究表明,传感器的基线漂移主要源于内部产生的热对流场的不稳定性。为了解决这一限制,开发了一个闭环温度控制(CTC)电路,通过连续负反馈来主动调节微加热器,稳定热激励源,并将温度引起的漂移减少了约90%。在此基础上,提出了一种三模式自适应融合滤波器,进一步抑制残留的超低频基线漂移和高频噪声,在保持动态阶跃响应的同时,进一步降低了70%的波动幅度。这两种互补机制在物理和信号领域建立了统一的稳定框架,实现了0.0698°的最小可检测角(MDA)和0.601 mV的输出标准差。Allan偏差分析进一步证实了长期稳定性的显著改善,加速度随机游走(ARW)降低到$2.399\乘以10 ^{-7\circ}$ / $ $ surd $ Hz,偏置不稳定性(BI)降低到$5.317\乘以10 ^{\ maththrm {-9}\circ}$。这些结果表明,所提出的双级稳定框架为在精密测量应用中实现高度稳定的热对流倾斜传感提供了有效的解决方案。[2026-0102]
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来源期刊
Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems 工程技术-工程:电子与电气
CiteScore
6.20
自引率
7.40%
发文量
115
审稿时长
7.5 months
期刊介绍: The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.
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