Tingfeng Peng;Mengqi Zheng;Yixuan Zhang;Yuan Wang;Michael Kraft;Huahuang Luo
{"title":"A Thermal Convection Tilt Sensor With Synergistic Thermal Control and Adaptive Filtering for Long-Term Drift Suppression","authors":"Tingfeng Peng;Mengqi Zheng;Yixuan Zhang;Yuan Wang;Michael Kraft;Huahuang Luo","doi":"10.1109/JMEMS.2026.3723938","DOIUrl":null,"url":null,"abstract":"This paper presents a thermal convection tilt sensor with synergistic thermal control and adaptive filtering for long-term drift suppression. Experimental investigations reveal that the baseline drift of the sensor primarily originates from the instability of the internally generated thermal convection field. To address this limitation, a closed-loop temperature control (CTC) circuit is developed to actively regulate the microheater through continuous negative feedback, stabilizing the thermal excitation source and reducing the temperature-induced drift by approximately 90%. Based on this source-level stabilization, a three-mode adaptive fusion filter is proposed to further suppress residual ultra-low-frequency baseline wander and high-frequency noise, achieving an additional 70% reduction in fluctuation amplitude while preserving the dynamic step response. Together, the two complementary mechanisms establish a unified stabilization framework across both physical and signal domains, which achieves a minimum detectable angle (MDA) of 0.0698° and an output standard deviation of 0.601 mV. Allan deviation analysis further confirms the substantial improvements in long-term stability, with the acceleration random walk (ARW) reduced to <inline-formula> <tex-math>$2.399\\times 10 ^{-7\\circ }$ </tex-math></inline-formula>/<inline-formula> <tex-math>$\\surd $ </tex-math></inline-formula>Hz and the bias instability (BI) reduced to <inline-formula> <tex-math>$5.317\\times 10 ^{\\mathrm {-9}\\circ }$ </tex-math></inline-formula>. These results demonstrate that the proposed dual-stage stabilization framework provides an effective solution for achieving highly stable thermal convection tilt sensing in precision measurement applications.[2026-0102]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"35 5","pages":"974-982"},"PeriodicalIF":3.5000,"publicationDate":"2026-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Microelectromechanical Systems","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/11661581/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2026/8/20 0:00:00","PubModel":"Epub","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents a thermal convection tilt sensor with synergistic thermal control and adaptive filtering for long-term drift suppression. Experimental investigations reveal that the baseline drift of the sensor primarily originates from the instability of the internally generated thermal convection field. To address this limitation, a closed-loop temperature control (CTC) circuit is developed to actively regulate the microheater through continuous negative feedback, stabilizing the thermal excitation source and reducing the temperature-induced drift by approximately 90%. Based on this source-level stabilization, a three-mode adaptive fusion filter is proposed to further suppress residual ultra-low-frequency baseline wander and high-frequency noise, achieving an additional 70% reduction in fluctuation amplitude while preserving the dynamic step response. Together, the two complementary mechanisms establish a unified stabilization framework across both physical and signal domains, which achieves a minimum detectable angle (MDA) of 0.0698° and an output standard deviation of 0.601 mV. Allan deviation analysis further confirms the substantial improvements in long-term stability, with the acceleration random walk (ARW) reduced to $2.399\times 10 ^{-7\circ }$ /$\surd $ Hz and the bias instability (BI) reduced to $5.317\times 10 ^{\mathrm {-9}\circ }$ . These results demonstrate that the proposed dual-stage stabilization framework provides an effective solution for achieving highly stable thermal convection tilt sensing in precision measurement applications.[2026-0102]
期刊介绍:
The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.