Non-Hermitian MEMS Disk Resonator Based on Thermoelastic Damping Regulation

Abstract

This paper demonstrates a non-Hermitian MEMS disk resonator gyroscope (DRG) by regulating thermoelastic damping and stiffness distribution. A segmented ring structure creates a substantial damping difference between frequency-matched wineglass modes, forming a passive PT-symmetric platform. Using electrostatic stiffness coupling, we directly observe eigenfrequency and linewidth Riemann surfaces and observe exceptional points. For frequency-mismatched devices, an anti-Stokes parametric pump enables dynamic coupling that produces the same topology in a Floquet frame. Measurements on vacuum-packaged DRG prototypes confirm large TED imbalance and electrically tunable Riemann surfaces. This work extends gyroscope theory into the non-Hermitian regime, establishes a practical pathway to exceptional-point-enhanced gyroscopes, and introduces dissipation contrast as a new design knob for sensor performance.[2025-0200]