A Low-Voltage-Driven Dual-Band Tunable Fabry--Pérot Filter

IF 3.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2026-10-01 Epub Date: 2026-08-20 DOI:10.1109/JMEMS.2026.3720621

Beichen Zhou;Chuheng Fu;Ningkang Dai;Yupeng Yan;Ying Jin;Gaopeng Xue;Min Wang

引用次数: 0

Abstract

Dual-band tunable filters are crucial for compact infrared detection, spectroscopy, and multi-band information acquisition, especially in short-wave infrared (SWIR) and mid-wave infrared (MWIR) systems. However, existing schemes rely on complex structures, leading to high complexity, poor integrability, and difficulty in stable low-voltage dual-band tuning. To solve these issues, we propose a low-voltage dual-band tunable MEMS Fabry–Pérot (F-P) filter for SWIR and MWIR, which is composed of an electrostatically actuated tunable air cavity sandwiched by a Dual-Band Mirror (DBM). The fabricated device achieves continuous dual-band spectral tuning under a driving voltage less than 15 V. The tuning ranges of 226 nm (2169-2394 nm) in SWIR and 440 nm (3816-4255 nm) in the MWIR are realized respectively, with an average transmittance above 60%. These results demonstrate the feasibility of the DBM design for low-voltage-driven and high-efficiency dual-band tuning applications. [2026-0067]

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一种低压驱动的双带可调谐法布里-帕姆罗特滤波器

双频可调谐滤波器对于小型红外探测、光谱和多波段信息采集至关重要，特别是在短波红外（SWIR）和中波红外（MWIR）系统中。然而，现有的方案依赖于复杂的结构，导致复杂性高，可积性差，难以实现稳定的低压双频段调谐。为了解决这些问题，我们提出了一种用于SWIR和MWIR的低压双频可调谐MEMS fabry - p (F-P)滤波器，该滤波器由静电驱动的可调谐空气腔夹在双频反射镜（DBM）中组成。该器件在小于15 V的驱动电压下实现了连续的双频光谱调谐。分别实现了226 nm （2169 ~ 2394 nm）和440 nm （3816 ~ 4255 nm）的SWIR调谐范围，平均透过率在60%以上。这些结果证明了DBM设计在低压驱动和高效率双频调谐应用中的可行性。(2026 - 0067)

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.