Fabrication and Characterization of High Magnetostrictive FeCoCr Thin Film and MEMS Magnetic Micro-Cantilevers

IF 3.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2026-10-01 Epub Date: 2026-07-21 DOI:10.1109/JMEMS.2026.3707335

Khushbu Khandal;Vinita;J. Arout Chelvane;Prashant Sharma;Jitendra Singh

{"title":"Fabrication and Characterization of High Magnetostrictive FeCoCr Thin Film and MEMS Magnetic Micro-Cantilevers","authors":"Khushbu Khandal;Vinita;J. Arout Chelvane;Prashant Sharma;Jitendra Singh","doi":"10.1109/JMEMS.2026.3707335","DOIUrl":null,"url":null,"abstract":"This study presents the design, fabrication, and comprehensive characterization of as-deposited magnetostrictive FeCo and FeCoCr thin films based micro-cantilevers. Chromium (Cr) was systematically doped into the FeCo thin films to investigate its effect on their magnetostrictive properties. The magnetostriction coefficient was precisely evaluated using a non-contact stroboscopic Laser Doppler Vibrometer (LDV) setup, where a Si/SiO<sub>2</sub>/FeCoCr microcantilever served as the mechanical transducer, converting magnetic energy into mechanical energy. The microcantilever was subjected to an in-plane external DC magnetic field, oriented either parallel or perpendicular to its length. Results revealed that increasing Cr content significantly enhanced the magnetostrictive response, achieving a peak value of magnetostriction approximately 151 ppm. Additionally, Cr incorporation improved the films mechanical, electrical, and structural properties, yielding a saturation magnetization of about 1172 emu/cm<sup>3</sup>, a residual tensile stress of + 85.53 MPa, a resistivity of around <inline-formula> <tex-math>$85.54~\\mu \\Omega $ </tex-math></inline-formula>-cm, and an average grain size of ~35 nm. These properties establish that FeCoCr thin films are promising material for micro-magnetic sensors and as efficient alternatives for electrode materials for the MEMS applications.[2026-0033]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"35 5","pages":"891-899"},"PeriodicalIF":3.5000,"publicationDate":"2026-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Microelectromechanical Systems","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/11616718/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2026/7/21 0:00:00","PubModel":"Epub","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

Abstract

This study presents the design, fabrication, and comprehensive characterization of as-deposited magnetostrictive FeCo and FeCoCr thin films based micro-cantilevers. Chromium (Cr) was systematically doped into the FeCo thin films to investigate its effect on their magnetostrictive properties. The magnetostriction coefficient was precisely evaluated using a non-contact stroboscopic Laser Doppler Vibrometer (LDV) setup, where a Si/SiO₂/FeCoCr microcantilever served as the mechanical transducer, converting magnetic energy into mechanical energy. The microcantilever was subjected to an in-plane external DC magnetic field, oriented either parallel or perpendicular to its length. Results revealed that increasing Cr content significantly enhanced the magnetostrictive response, achieving a peak value of magnetostriction approximately 151 ppm. Additionally, Cr incorporation improved the films mechanical, electrical, and structural properties, yielding a saturation magnetization of about 1172 emu/cm³, a residual tensile stress of + 85.53 MPa, a resistivity of around

$85.54~\mu \Omega $

-cm, and an average grain size of ~35 nm. These properties establish that FeCoCr thin films are promising material for micro-magnetic sensors and as efficient alternatives for electrode materials for the MEMS applications.[2026-0033]

查看原文本刊更多论文

高磁致伸缩FeCoCr薄膜和MEMS磁性微悬臂梁的制备与表征

本研究介绍了磁致伸缩FeCo和FeCoCr薄膜微悬臂梁的设计、制造和综合表征。系统地将铬（Cr）掺杂到FeCo薄膜中，研究其对薄膜磁致伸缩性能的影响。采用非接触式频频激光多普勒振动仪（LDV）装置精确评估了磁致伸缩系数，其中Si/SiO2/FeCoCr微悬臂梁作为机械换能器，将磁能转换为机械能。微悬臂受到平行或垂直于其长度的平面内外部直流磁场的作用。结果表明，Cr含量的增加显著增强了材料的磁致伸缩响应，其磁致伸缩峰值约为151 ppm。此外，Cr的加入改善了薄膜的机械、电学和结构性能，使薄膜的饱和磁化强度约为1172 emu/cm3，残余拉伸应力为+ 85.53 MPa，电阻率约为$85.54~\mu \Omega $ -cm，平均晶粒尺寸为35 nm。这些特性表明，FeCoCr薄膜是微磁传感器和MEMS应用中电极材料的有效替代品。[2026-0033]

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.