Low-Frequency Pressure-Gradient MEMS Vector Hydrophone Using AlN/ScAlN Composite Films

IF 3.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2026-10-01 Epub Date: 2026-08-20 DOI:10.1109/JMEMS.2026.3723452

Zhenyao Shi;Rong Dang;Junyang Li;Chenghao Hu;Guojun Zhang;Renxin Wang;Wendong Zhang;Licheng Jia

{"title":"Low-Frequency Pressure-Gradient MEMS Vector Hydrophone Using AlN/ScAlN Composite Films","authors":"Zhenyao Shi;Rong Dang;Junyang Li;Chenghao Hu;Guojun Zhang;Renxin Wang;Wendong Zhang;Licheng Jia","doi":"10.1109/JMEMS.2026.3723452","DOIUrl":null,"url":null,"abstract":"Low-frequency MEMS vector hydrophones are limited by the inherently weak pressure-gradient response and inefficient underwater acoustic coupling. This letter presents a low-frequency pressure-gradient MEMS vector hydrophone based on AlN/Sc<sub>0.2</sub>Al<sub>0.8</sub>N composite piezoelectric films. The device employs a hexagonal diaphragm fabricated on an SOI platform with silicone-oil-filled cavities, enabling a pressure gradient to develop across the sensing units, which is subsequently converted into electrical signals through the piezoelectric effect. Furthermore, two orthogonally arranged pairs of sensing units enable two-dimensional vector acoustic sensing. Measurements show a stable dipole directivity from 50 Hz to 1 kHz and a receiving sensitivity of −163 dB (re: 1 V/<inline-formula> <tex-math>$\\mu $ </tex-math></inline-formula>Pa) at 1 kHz. These results demonstrate the capability of the proposed hydrophone for high-precision low-frequency underwater vector acoustic sensing. [2026-0126]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"35 5","pages":"768-770"},"PeriodicalIF":3.5000,"publicationDate":"2026-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Microelectromechanical Systems","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/11661657/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2026/8/20 0:00:00","PubModel":"Epub","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

Abstract

Low-frequency MEMS vector hydrophones are limited by the inherently weak pressure-gradient response and inefficient underwater acoustic coupling. This letter presents a low-frequency pressure-gradient MEMS vector hydrophone based on AlN/Sc_0.2Al_0.8N composite piezoelectric films. The device employs a hexagonal diaphragm fabricated on an SOI platform with silicone-oil-filled cavities, enabling a pressure gradient to develop across the sensing units, which is subsequently converted into electrical signals through the piezoelectric effect. Furthermore, two orthogonally arranged pairs of sensing units enable two-dimensional vector acoustic sensing. Measurements show a stable dipole directivity from 50 Hz to 1 kHz and a receiving sensitivity of −163 dB (re: 1 V/

$\mu $

Pa) at 1 kHz. These results demonstrate the capability of the proposed hydrophone for high-precision low-frequency underwater vector acoustic sensing. [2026-0126]

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基于AlN/ScAlN复合膜的低频压力梯度MEMS矢量水听器

低频MEMS矢量水听器受到固有的弱压力梯度响应和低效水声耦合的限制。本文提出了一种基于AlN/Sc0.2Al0.8N复合压电薄膜的低频压力梯度MEMS矢量水听器。该装置采用在SOI平台上制造的六角形膜片，具有充满硅油的腔体，使压力梯度能够在传感单元上形成，随后通过压电效应将其转换为电信号。此外，两对正交排列的传感单元使二维矢量声传感成为可能。测量表明，偶极子指向性在50 Hz至1 kHz范围内稳定，在1 kHz时的接收灵敏度为- 163 dB （re: 1 V/ $\mu $ Pa）。实验结果表明，所提出的水听器具有高精度低频水下矢量声传感的能力。(2026 - 0126)

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.