Suspended Lithium Niobate Single-Crystal Thin Film Arrays for High-Speed Infrared Pyroelectric Sensing

IF 3.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2026-10-01 Epub Date: 2026-07-31 DOI:10.1109/JMEMS.2026.3717270

Yuqing Hu;Jiayi Liu;Qing Wan;Xianhao Le

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引用次数: 0

Abstract

Conventional infrared detectors, hindered by millisecond-level response speeds, fail to meet the demands of ultrafast dynamic sensing in security, medical care, and other fields. While pyroelectric detectors offer cooling-free, room-temperature operation, traditional materials suffer from slow thermal relaxation, severely limiting high-speed performance. To overcome this bottleneck, this work implements a material-structure synergistic optimization strategy. We developed a high-speed pyroelectric device integrating a specific Y-41-cut LiNbO₃ single-crystal thin film with a planar array structure. In addition, the device incorporates an SiO₂ infrared absorption layer to enhance photothermal conversion efficiency. The fabricated device achieves a remarkable response time of

$31~\mu $

s and maintains stable voltage output under 60 kHz laser excitation. This synergistic approach successfully breaks through traditional speed limitations, providing a significant technical advancement for high-performance infrared pyroelectric detection systems. [2026-0037]

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用于高速红外热释电传感的悬浮铌酸锂单晶薄膜阵列

传统的红外探测器受到毫秒级响应速度的阻碍，无法满足安防、医疗等领域对超快动态传感的需求。虽然热释电探测器提供无冷却，室温操作，但传统材料的热松弛缓慢，严重限制了高速性能。为了克服这一瓶颈，本工作实现了材料-结构协同优化策略。我们开发了一种高速热释电器件，将特定的y -41切割LiNbO3单晶薄膜与平面阵列结构集成在一起。此外，该器件还集成了SiO2红外吸收层，以提高光热转换效率。该器件的响应时间为$31~\mu $ s，在60 kHz激光激励下保持稳定的电压输出。这种协同方法成功地突破了传统的速度限制，为高性能红外热释电探测系统提供了重大的技术进步。(2026 - 0037)

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.