A Bilayer Liquid–Metal Interdigitated Capacitive Sensor for Omnidirectional Strain Decoupling in Wearable Motion Monitoring

IF 2.8 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC
Fan Lei, Yandong Yang, Jiayi Yang, Zheng Zhang
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Abstract

Soft and stretchable strain sensors are important for human–machine interfaces, soft robotics, and electronic skins. However, most existing sensors cannot simultaneously resolve strain magnitude and direction and are easily affected by normal pressure under multidirectional deformation. To solve this problem, we present a bilayer liquid–metal interdigitated capacitive omnidirectional flexible strain sensor. The device employs liquid–metal interdigitated electrodes encapsulated in Ecoflex and is fabricated as a five-layer sandwich structure via a low-cost mask-assisted laser patterning process. By integrating two capacitive sensing units, C1 (lower sensing layer) and C2 (upper sensing layer), with distinct orientations in a 30° cross-stacked architecture, the device can detect in-plane strain with different directional responses. Single-layer interdigitated electrodes show different capacitive responses when stretched parallel or perpendicular to the electrode direction, whereas the bilayer structure generates distinguishable dual-channel outputs over tensile directions from 0° to 180°. Simulations and experiments confirm a linear, repeatable, and direction-dependent response under multidirectional stretching. Leave-one-angle-out cross-validation yielded a mean absolute angular error of 3.12°, an angular root-mean-square error of 3.70°, and a maximum absolute angular error of 6.05°. Under normal loads of 10–17.5 N, the capacitance signals of both channels remain nearly unchanged, indicating low sensitivity to normal pressure. On-body tests further showed that the sensor records stable and reproducible direction-dependent strain signals during periodic wrist, knee, and waist motions. This work provides a design strategy for flexible capacitive strain sensors in wearable direction-resolved strain monitoring, health sensing, and electronic skin.

一种用于可穿戴运动监测中全方位应变解耦的双层液-金属互指电容式传感器
柔性和可拉伸应变传感器对于人机界面、软机器人和电子皮肤非常重要。然而,现有的传感器大多不能同时分辨应变的大小和方向,在多向变形下容易受到法向压力的影响。为了解决这一问题,我们提出了一种双层液-金属互指电容式全向柔性应变传感器。该装置采用Ecoflex封装的液态金属交错电极,并通过低成本掩模辅助激光图像化工艺制成五层夹层结构。通过将C1(下感测层)和C2(上感测层)两个取向不同的电容式感测单元以30°交叉堆叠的方式集成在一起,该器件可以检测具有不同方向响应的面内应变。单层交错电极在平行或垂直于电极方向拉伸时表现出不同的电容响应,而双层结构在0°至180°拉伸方向上产生可区分的双通道输出。仿真和实验证实了多向拉伸下的线性、可重复和方向相关的响应。留一个角交叉验证的平均绝对角误差为3.12°,角均方根误差为3.70°,最大绝对角误差为6.05°。在10-17.5 N的正常负载下,两个通道的电容信号几乎保持不变,表明对常压的敏感性较低。身体测试进一步表明,传感器在周期性的手腕、膝盖和腰部运动中记录稳定且可重复的方向依赖的应变信号。这项工作为可穿戴式方向分辨应变监测、健康传感和电子皮肤中的柔性电容应变传感器提供了一种设计策略。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Journal of Electronic Materials
Journal of Electronic Materials 工程技术-材料科学:综合
CiteScore
4.10
自引率
4.80%
发文量
693
审稿时长
3.8 months
期刊介绍: The Journal of Electronic Materials (JEM) reports monthly on the science and technology of electronic materials, while examining new applications for semiconductors, magnetic alloys, dielectrics, nanoscale materials, and photonic materials. The journal welcomes articles on methods for preparing and evaluating the chemical, physical, electronic, and optical properties of these materials. Specific areas of interest are materials for state-of-the-art transistors, nanotechnology, electronic packaging, detectors, emitters, metallization, superconductivity, and energy applications. Review papers on current topics enable individuals in the field of electronics to keep abreast of activities in areas peripheral to their own. JEM also selects papers from conferences such as the Electronic Materials Conference, the U.S. Workshop on the Physics and Chemistry of II-VI Materials, and the International Conference on Thermoelectrics. It benefits both specialists and non-specialists in the electronic materials field. A journal of The Minerals, Metals & Materials Society.
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