Simulation and Experimentation of Micro/Nano Plasma Switches for High-Power Fast Pulse Generation

Abstract

This paper addresses two critical challenges in micro/nano plasma switch (MNPS) research: the lack of reliable physical models for device design and the absence of equivalent circuit models for circuit design. First, we resolve the convergence and model mismatch issues of MNPS in COMSOL Multiphysics simulations by introducing a field enhancement factor and improving the boundary conditions. This can enable us to establish a clear relationship between device structure and working voltage, effectively guiding device structure design and working voltage determination. Devices designed based on this model are experimentally validated, confirming the accuracy of the physical model and demonstrating an ultrafast switching speed exceeding 8.5 V/ps, surpassing the speed limits of traditional solid-state devices. Furthermore, at the circuit level, an equivalent circuit model of the MNPS is established based on measurement data and simulation parameter extraction. Based on this, we design and construct the MNPS-Marx pulse source for the first time. Experimental results show that measured waveforms closely matched simulations, validating the effectiveness of the model. This pulse source achieves kilovolt-level output, sub-nanosecond pulse widths, and a rise times < 80 ps, offering new possibilities for pulse power systems and ultra-wideband radar applications.