Fluorine Determination via Megahertz and Gigahertz Inductively Coupled Plasma Mass Spectrometry: A Review

Abstract

This review summarizes published studies on the mass spectrometric determination of fluorine using conventional megahertz inductively coupled plasma and microwave (gigahertz) inductively coupled plasma. The formation of F⁺, F^–, BaF⁺, and other fluorine-containing polyatomic ions in high-temperature inductively coupled plasma is examined, along with the analytical performance achieved for fluorine determination using different analytical approaches. Particular attention is given to the selection of chemical reagents for the mass spectrometric determination of fluorine via polyatomic ions, as well as to the investigation of the effects of operating parameters on the BaF⁺ ion signal. Isobaric spectral interferences encountered during fluorine determination and the methods used to eliminate them are discussed. The feasibility of fluorine determination using various fluorine-containing polyatomic ions formed by chemical ionization in the cold afterglow regions of megahertz inductively coupled plasma is demonstrated. Publications on the mass spectrometric determination of fluorine using microwave plasma and various chemical ionization strategies for the formation of fluorine-containing polyatomic ions are also reviewed. Conclusions and recommendations based on the reviewed publications are presented.