Nano-thick freestanding and reusable epidermal electronics via edge-supporting strategy.

IF 11.1 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION
Zehan Liu, Shengzhao Wang, Yina He, Chuchao Wang, Qihong Wu, Ran Yang, Xihan Wang, Weifeng Zhang, Weiqiang Hong, Yuan Gao, Yi Li, Mengxi Wu, Junshan Liu
{"title":"Nano-thick freestanding and reusable epidermal electronics via edge-supporting strategy.","authors":"Zehan Liu, Shengzhao Wang, Yina He, Chuchao Wang, Qihong Wu, Ran Yang, Xihan Wang, Weifeng Zhang, Weiqiang Hong, Yuan Gao, Yi Li, Mengxi Wu, Junshan Liu","doi":"10.1038/s41378-026-01422-x","DOIUrl":null,"url":null,"abstract":"<p><p>Nano-thick epidermal electronics have extraordinary lightweight and conformability characteristics, thus enable high-quality signal acquisition and imperceptible wearing experience. However, reducing the device thickness to nanoscale makes the rigidity extremely low thus the device curls spontaneously, imposing unprecedented challenges to the device fabrication, handling and recycling. To resolve the dilemma of epidermal electronics, we propose an edge-supporting strategy that maintains the benefits of nano thickness, meanwhile obtains practicality and reusability via reinforced edge scaffold. The nano-thick (~500 nm thick) core area of the device provides perfect conformal, firm, and burdenless contact with human skin. On the other hand, the edge scaffold (~5 μm thick) plays an important role in protecting internal fragile film from external forces and providing rigid support during handling and recycling. In addition, the edge scaffold enables spontaneous release of nano-thick electronics from the substrate in water, getting rid of the use of sacrificial layers and etchants. We demonstrate the use of the edge-supporting strategy to develop a physiological electrode with low impedance less than 3.6 kΩ at 1 kHz, a resistance-type temperature sensor with fast response time less than 0.5 ms and a nanoengineering-based pressure sensor with high sensitivity of 62.9 kPa<sup>-1</sup>. Our work provides an effective method to handle and release nano-thick electronics without using external stamps, thereby enabling truly practical applications of ultrathin flexible electronics in the fields of wearable technology, healthcare and so on.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"12 1","pages":""},"PeriodicalIF":11.1000,"publicationDate":"2026-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13476273/pdf/","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microsystems & Nanoengineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1038/s41378-026-01422-x","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
引用次数: 0

Abstract

Nano-thick epidermal electronics have extraordinary lightweight and conformability characteristics, thus enable high-quality signal acquisition and imperceptible wearing experience. However, reducing the device thickness to nanoscale makes the rigidity extremely low thus the device curls spontaneously, imposing unprecedented challenges to the device fabrication, handling and recycling. To resolve the dilemma of epidermal electronics, we propose an edge-supporting strategy that maintains the benefits of nano thickness, meanwhile obtains practicality and reusability via reinforced edge scaffold. The nano-thick (~500 nm thick) core area of the device provides perfect conformal, firm, and burdenless contact with human skin. On the other hand, the edge scaffold (~5 μm thick) plays an important role in protecting internal fragile film from external forces and providing rigid support during handling and recycling. In addition, the edge scaffold enables spontaneous release of nano-thick electronics from the substrate in water, getting rid of the use of sacrificial layers and etchants. We demonstrate the use of the edge-supporting strategy to develop a physiological electrode with low impedance less than 3.6 kΩ at 1 kHz, a resistance-type temperature sensor with fast response time less than 0.5 ms and a nanoengineering-based pressure sensor with high sensitivity of 62.9 kPa-1. Our work provides an effective method to handle and release nano-thick electronics without using external stamps, thereby enabling truly practical applications of ultrathin flexible electronics in the fields of wearable technology, healthcare and so on.

纳米厚的独立和可重复使用的表皮电子产品通过边缘支撑策略。
纳米厚表皮电子产品具有非凡的轻量化和一致性特性,从而实现高质量的信号采集和不易察觉的佩戴体验。然而,将器件厚度减小到纳米级会使其刚性极低,从而使器件自发卷曲,给器件的制造、处理和回收带来前所未有的挑战。为了解决表皮电子学的困境,我们提出了一种边缘支撑策略,在保持纳米厚度优势的同时,通过增强边缘支架获得实用性和可重用性。该设备的纳米厚(~ 500nm厚)核心区域提供了与人体皮肤完美的保形,坚固和无负担的接触。另一方面,边缘支架(~5 μm厚)在搬运和回收过程中起到保护内部脆弱薄膜免受外力影响和提供刚性支撑的重要作用。此外,边缘支架可以使纳米厚电子从衬底中自发释放到水中,从而摆脱了牺牲层和蚀刻剂的使用。我们演示了使用边缘支持策略开发了1 kHz低阻抗小于3.6 kΩ的生理电极,快速响应时间小于0.5 ms的电阻型温度传感器和高灵敏度为62.9 kPa-1的纳米工程压力传感器。我们的工作提供了一种有效的方法来处理和释放纳米厚的电子产品,而不使用外部印章,从而实现超薄柔性电子产品在可穿戴技术,医疗保健等领域的真正实际应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信
小红书