{"title":"Features of the Action of a High-Power Ion Beam of Nanosecond Duration on an AlN Thin Piezoelectric Film","authors":"V. S. Kovivchak","doi":"10.1134/S1027451026700746","DOIUrl":null,"url":null,"abstract":"<p>The destruction and change of elemental composition of surface layers of an AlN thin film deposited by reactive magnetron sputtering on a glass ceramic substrate (including metal sublayer) under the influence of high-power ion beam of nanosecond duration have been investigated. The spatial characteristics of the surface destruction of the film have been determined. Cracking of the film, as well as partial or complete removal of fragments of film destruction, is observed depending on the beam current density. The effect of a high-power ion beam on the systems AlN thin film‒Al thin film‒glass ceramic and Al thin film‒AlN thin film‒Al thin film‒glass ceramic was considered. The formation of aluminum droplets on the surface of glass ceramic in the areas of the removed Al film, as well as on the surface of fragments of AlN film destruction at a single irradiation with a high-power ion beam with current density up to 150 A/cm<sup>2</sup> was found. The depletion of the surface layer of the film by nitrogen was established. Possible mechanisms for the observed changes in the surface layer of AlN thin film are discussed.</p>","PeriodicalId":671,"journal":{"name":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","volume":"20 2","pages":"320 - 324"},"PeriodicalIF":0.4000,"publicationDate":"2026-08-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","FirstCategoryId":"1085","ListUrlMain":"https://link.springer.com/article/10.1134/S1027451026700746","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
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Abstract
The destruction and change of elemental composition of surface layers of an AlN thin film deposited by reactive magnetron sputtering on a glass ceramic substrate (including metal sublayer) under the influence of high-power ion beam of nanosecond duration have been investigated. The spatial characteristics of the surface destruction of the film have been determined. Cracking of the film, as well as partial or complete removal of fragments of film destruction, is observed depending on the beam current density. The effect of a high-power ion beam on the systems AlN thin film‒Al thin film‒glass ceramic and Al thin film‒AlN thin film‒Al thin film‒glass ceramic was considered. The formation of aluminum droplets on the surface of glass ceramic in the areas of the removed Al film, as well as on the surface of fragments of AlN film destruction at a single irradiation with a high-power ion beam with current density up to 150 A/cm2 was found. The depletion of the surface layer of the film by nitrogen was established. Possible mechanisms for the observed changes in the surface layer of AlN thin film are discussed.
期刊介绍：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.
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