Defect-mediated generation-recombination dynamics governing conductance response in floating-body transistors.

IF 11.1 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION
Been Kwak, Changhyeon Han, Hwoibin You, Wongi Hong, Joonhyeok Choi, Youngchan Cho, Sangwan Kim, Wonjun Shin, Daewoong Kwon
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引用次数: 0

Abstract

As CMOS technologies evolve toward ultra-thin floating-body architectures, defect-mediated carrier dynamics increasingly dominate device behavior, challenging conventional linear interpretations of electrical response in nanoscale transistors. In this work, we demonstrate that the conductance response of foundry-fabricated floating-body transistors is governed by generation-recombination (GR) dynamics associated with deep-level defects inside the ultra-thin silicon body. Frequency-dependent conductance measurements reveal bell-shaped responses that exhibit weak gate-bias dependence but strong temperature sensitivity, deviating fundamentally from conventional interface-trap-dominated behavior observed in bulk MOSFETs. By correlating conductance analysis with temperature-dependent low-frequency noise spectroscopy, we identify a common dynamical origin of both phenomena and extract the energetic position and density of channel defects. The conductance peak dynamics follow thermally activated GR processes, indicating that the measured admittance reflects a complex interaction between inversion carriers and channel defects under volume-inversion conditions. Furthermore, electrical stress induces a bias-dependent transition in the dominant conductance mechanism, revealing a crossover from interface-controlled to channel-defect-controlled dynamics. These findings indicate that conductance measurements in ultra-thin floating-body transistors probe a coupled defect system, providing a physically grounded framework for interpreting conductance and noise dynamics in advanced nanoscale electronic devices.

控制浮体晶体管电导响应的缺陷介导的生成-重组动力学。
随着CMOS技术向超薄浮体架构发展,缺陷介导的载流子动力学日益主导器件行为,挑战了纳米级晶体管电响应的传统线性解释。在这项工作中,我们证明了代工厂制造的浮体晶体管的电导响应受与超薄硅体内部深层缺陷相关的生成重组(GR)动力学控制。频率相关的电导测量显示钟形响应表现出弱的栅极偏置依赖性,但具有很强的温度敏感性,从根本上偏离了在大块mosfet中观察到的传统界面陷阱主导行为。通过将电导分析与温度相关的低频噪声光谱相关联,我们确定了这两种现象的共同动力学根源,并提取了通道缺陷的能量位置和密度。电导峰值动力学遵循热激活GR过程,表明在体积反转条件下,测量的导纳反映了反转载流子和通道缺陷之间复杂的相互作用。此外,电应力在主导电导机制中诱导了偏置依赖的转变,揭示了从界面控制到通道缺陷控制的交叉动力学。这些发现表明,超薄浮体晶体管的电导测量探测了耦合缺陷系统,为解释先进纳米级电子器件的电导和噪声动力学提供了物理基础框架。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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