Light-Activated Luminophores Based on Carbazolyl Oxime Esters for Real-Time Monitoring Photolithographic Processes

Abstract

Photoactivatable luminescent materials have emerged as promising candidates for applications in information encryption, anti-counterfeiting, and bioimaging. However, for practical application in photolithographic processes, some fundamental requirements such as material compatibility and suitability with exposure to light sources remain challenging for photo-activated luminescent materials. Herein, two radical-mediated photoinitiators, oxe02 and oxe03, were developed as novel photo-activated luminescent materials and incorporated into photoresist formulations to enable direct visualization of pattern quality. In their native state, these molecules are non-luminescent; upon ultraviolet (UV) exposure, they undergo photolytic cleavage to generate radicals that subsequently initiate luminescence. Upon exposure, the photoinitiators in the photoresist are activated and emit strong luminescence, enabling direct visualization of the pattern prior to development and facilitating rapid evaluation of pattern quality. The findings not only expand the functional scope of photoinitiators in luminescent material systems but also propose a viable strategy for real-time monitoring in photolithographic processes, demonstrating significant promise for practical applications.