Atomic Layer Deposition of Metallic Molybdenum Dioxide Thin Films Enabling High-k Rutile Capacitors (Adv. Mater. Interfaces 14/2026)

IF 4.5 3区材料科学 Q2 CHEMISTRY, MULTIDISCIPLINARY

Advanced Materials Interfaces Pub Date : 2026-07-21 DOI:10.1002/admi.70538

Alexey Ganzhinov, Miika Mattinen, Marko Vehkamäki, Kenichiro Mizohata, Mykhailo Chundak, Georgi Popov, Paavo Porri, Mikko Ritala, Matti Putkonen

引用次数: 0

Abstract

Atomic Layer Deposition

Conformal metallic molybdenum dioxide thin films enabled by atomic layer deposition. These films stabilize titanium dioxide dielectric in the high-k rutile phase at low temperatures, which is critical for advanced capacitor devices such as those inside dynamic random-access memory cells. Atomic layer deposition is integral for modern devices which feature complex 3D structures and high aspect ratios. More details can be found in the Research Article by Alexey Ganzhinov, Matti Putkonen, and co-workers (DOI: 10.1002/admi.70512).

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制备高k金红石电容器的金属二氧化钼薄膜的原子层沉积。接口14/2026)

原子层沉积通过原子层沉积实现共形金属二氧化钼薄膜。这些薄膜在低温下将二氧化钛电介质稳定在高k金红石相，这对于先进的电容器器件（如动态随机存取存储单元内的器件）至关重要。原子层沉积对于具有复杂3D结构和高纵横比的现代设备是不可或缺的。更多细节可以在Alexey Ganzhinov， Matti Putkonen及其同事的研究文章中找到（DOI: 10.1002/ admin .70512）。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Advanced Materials Interfaces CHEMISTRY, MULTIDISCIPLINARY-MATERIALS SCIENCE, MULTIDISCIPLINARY

CiteScore

8.40

自引率

5.60%

发文量

1174

审稿时长

1.3 months

期刊介绍： Advanced Materials Interfaces publishes top-level research on interface technologies and effects. Considering any interface formed between solids, liquids, and gases, the journal ensures an interdisciplinary blend of physics, chemistry, materials science, and life sciences. Advanced Materials Interfaces was launched in 2014 and received an Impact Factor of 4.834 in 2018. The scope of Advanced Materials Interfaces is dedicated to interfaces and surfaces that play an essential role in virtually all materials and devices. Physics, chemistry, materials science and life sciences blend to encourage new, cross-pollinating ideas, which will drive forward our understanding of the processes at the interface. Advanced Materials Interfaces covers all topics in interface-related research: Oil / water separation, Applications of nanostructured materials, 2D materials and heterostructures, Surfaces and interfaces in organic electronic devices, Catalysis and membranes, Self-assembly and nanopatterned surfaces, Composite and coating materials, Biointerfaces for technical and medical applications. Advanced Materials Interfaces provides a forum for topics on surface and interface science with a wide choice of formats: Reviews, Full Papers, and Communications, as well as Progress Reports and Research News.