A. K. Akhmedov, E. K. Murliev, A. Sh. Asvarov, V. M. Kanevsky
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引用次数: 0
Abstract
Transparent conducting nonstoichiometric indium oxide (In2O3–х) thin films have been obtained by RF magnetron sputtering of a ceramic target in an inert argon atmosphere. It is shown that, during the nonequilibrium deposition, the substrate temperature and atmospheric composition directly affect the nonstoichiometry of the deposited material and the defect structure of its nanocrystalline state. It has been concluded by analyzing the observed dependences that the nonstoichiometric film growth occurs under the condition of competing processes of heterogeneous indium oxidation and thermal desorption of oxygen from the growing surface, which prevail at a certain substrate temperature. The resulting defect structure ultimately determines the characteristics of carrier transport in the In2O3–х thin film and the thermal stability of its electrical properties.
期刊介绍：
Nanobiotechnology Reports publishes interdisciplinary research articles on fundamental aspects of the structure and properties of nanoscale objects and nanomaterials, polymeric and bioorganic molecules, and supramolecular and biohybrid complexes, as well as articles that discuss technologies for their preparation and processing, and practical implementation of products, devices, and nature-like systems based on them. The journal publishes original articles and reviews that meet the highest scientific quality standards in the following areas of science and technology studies: self-organizing structures and nanoassemblies; nanostructures, including nanotubes; functional and structural nanomaterials; polymeric, bioorganic, and hybrid nanomaterials; devices and products based on nanomaterials and nanotechnology; nanobiology and genetics, and omics technologies; nanobiomedicine and nanopharmaceutics; nanoelectronics and neuromorphic computing systems; neurocognitive systems and technologies; nanophotonics; natural science methods in a study of cultural heritage items; metrology, standardization, and monitoring in nanotechnology.
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