Three-dimensional Microstructuring of Chalcogenide Glass by Femtosecond Laser Exposure and Subsequent Chemical Etching

IF 2 3区材料科学 Q2 MATERIALS SCIENCE, CERAMICS

International Journal of Applied Glass Science Pub Date : 2026-07-07 DOI:10.1111/ijag.70050

Gözden Torun, Anupama Yadav, Rashi Sharma, Kathleen A. Richardson, Yves Bellouard

引用次数: 0

Abstract

Chalcogenide glass has the broadest reported transparency in the infrared, making them particularly attractive for spectroscopy and infrared imagery. Yet, it remains a difficult material to shape in arbitrary form. In this paper, we explore the combination of femtosecond laser-exposure and subsequent chemical etching steps to produce arbitrary 3D shapes out of a chalcogenide glass substrate coated with a SiO₂ thin film. In this context, we discuss how laser parameters locally influence the etching rate.

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飞秒激光曝光及后续化学蚀刻法制备硫化物玻璃的三维微结构

硫系玻璃在红外线中具有最广泛的透明度，这使得它们对光谱和红外成像特别有吸引力。然而，它仍然是一种难以形成任意形状的材料。在本文中，我们探索了飞秒激光曝光和随后的化学蚀刻步骤的结合，以产生任意3D形状的硫系玻璃衬底涂有SiO2薄膜。在这种情况下，我们讨论了激光参数如何局部影响蚀刻速率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Journal of Applied Glass Science MATERIALS SCIENCE, CERAMICS-

CiteScore

4.50

自引率

9.50%

发文量

审稿时长

>12 weeks

期刊介绍： The International Journal of Applied Glass Science (IJAGS) endeavors to be an indispensable source of information dealing with the application of glass science and engineering across the entire materials spectrum. Through the solicitation, editing, and publishing of cutting-edge peer-reviewed papers, IJAGS will be a highly respected and enduring chronicle of major advances in applied glass science throughout this century. It will be of critical value to the work of scientists, engineers, educators, students, and organizations involved in the research, manufacture and utilization of the material glass. Guided by an International Advisory Board, IJAGS will focus on topical issue themes that broadly encompass the advanced description, application, modeling, manufacture, and experimental investigation of glass.