Monolithic three-dimensional integration of heterogeneous electronics for self-powered sensing and processing

IF 42.3 1区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

Nature Electronics Pub Date : 2026-06-23 DOI:10.1038/s41928-026-01624-1

Subir Ghosh, Pranavram Venkatram, Harikrishnan Ravichandran, Rishikesh T. Nair, Yongwen Sun, Lei Ding, Chen Chen, Joan M. Redwing, Yang Yang, Saptarshi Das

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Abstract

Self-powered microelectronics systems generate energy from ambient sources like light, heat or mechanical vibrations using on-chip devices, and the overall system is designed to minimize its power footprint. These systems can be used to build systems that operate autonomously without an external power source. Such systems are of particular interest in edge computing, internet of things devices and remote-sensing technologies, for which replacing or recharging batteries is impractical. Here we report on a monolithic three-dimensional integrated circuit that stacks graphene transistors in the top tier for low-power chemical sensing, complementary logic circuits based on n-type monolayer molybdenum disulfide (MoS2) and p-type bilayer tungsten diselenide (WSe2) in the middle tier for low-power computing, and an on-chip silicon photovoltaic module in the bottom tier to harvest ambient light. The integrated system, which operates solely on ambient light, can distinguish between various chemical solutions and generate corresponding digital codes in a fully sustainable manner. We also demonstrate the dense integration of data and power vias across the tiers and show that the intertier separation can be reduced to 50 nm. A low-power self-powered integrated system for sensing and computing can be created through the monolithic integration of tiers containing graphene-based chemical sensors, two-dimensional semiconductor-based complementary logic and silicon photovoltaic modules.

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用于自供电传感和处理的异构电子的单片三维集成

自供电微电子系统利用片上设备从光、热或机械振动等环境源中产生能量，整个系统的设计旨在最大限度地减少其功耗。这些系统可用于构建无需外部电源即可自主运行的系统。这种系统对边缘计算、物联网设备和遥感技术特别感兴趣，因为更换或充电电池是不切实际的。在这里，我们报道了一种单片三维集成电路，它在顶层堆叠石墨烯晶体管用于低功耗化学传感，在中间层堆叠基于n型单层二硫化钼（MoS2）和p型双层二硒化钨（WSe2）的互补逻辑电路用于低功耗计算，在底层堆叠片上硅光伏模块用于收集环境光。该集成系统仅在环境光下运行，可以区分各种化学溶液，并以完全可持续的方式生成相应的数字代码。我们还展示了跨层的数据和功率通孔的密集集成，并表明层间距离可以减少到50 nm。通过包含石墨烯化学传感器、二维半导体互补逻辑和硅光伏模块的单片集成层，可以创建一个用于传感和计算的低功耗自供电集成系统。

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来源期刊

Nature Electronics Engineering-Electrical and Electronic Engineering

CiteScore

47.50

自引率

2.30%

发文量

159

期刊介绍： Nature Electronics is a comprehensive journal that publishes both fundamental and applied research in the field of electronics. It encompasses a wide range of topics, including the study of new phenomena and devices, the design and construction of electronic circuits, and the practical applications of electronics. In addition, the journal explores the commercial and industrial aspects of electronics research. The primary focus of Nature Electronics is on the development of technology and its potential impact on society. The journal incorporates the contributions of scientists, engineers, and industry professionals, offering a platform for their research findings. Moreover, Nature Electronics provides insightful commentary, thorough reviews, and analysis of the key issues that shape the field, as well as the technologies that are reshaping society. Like all journals within the prestigious Nature brand, Nature Electronics upholds the highest standards of quality. It maintains a dedicated team of professional editors and follows a fair and rigorous peer-review process. The journal also ensures impeccable copy-editing and production, enabling swift publication. Additionally, Nature Electronics prides itself on its editorial independence, ensuring unbiased and impartial reporting. In summary, Nature Electronics is a leading journal that publishes cutting-edge research in electronics. With its multidisciplinary approach and commitment to excellence, the journal serves as a valuable resource for scientists, engineers, and industry professionals seeking to stay at the forefront of advancements in the field.