Study on the infrared femtosecond laser ablation behavior and mechanism of pressureless sintered silicon carbide ceramics

IF 5.6 2区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Ceramics International Pub Date : 2026-04-01 Epub Date: 2026-02-04 DOI:10.1016/j.ceramint.2026.02.046

Xiaozhu Chen , Congyi Wu , Youmin Rong , Guojun Zhang , Yu Huang

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Abstract

Pressureless sintered silicon carbide (PS-SiC) ceramics are critical for optical and electronic components, yet their ablation mechanism under infrared femtosecond (IR-fs) laser irradiation remains unclear. This study investigates the ablation threshold, incubation effect, and micro-structural evolution of PS-SiC. Using the area epitaxy method, the ablation threshold was found to decrease from 4.97 J/cm² to 1.49 J/cm² as cumulative pulses increased from 1 to 100, yielding an incubation factor of 0.73. Due to the wide bandgap of SiC, the photon energy of the IR laser is insufficient to induce photochemical decomposition of the Si-C bond, and the photothermal effect mainly drives the ablation of PS-SiC ceramics. The Si, SiO₂, and C products formed from the thermal decomposition of PS-SiC ceramics are deposited on the ablated region's surface, accompanied by phase transformations of amorphous carbon to graphite and amorphous α-Si to crystalline c-Si. Furthermore, Laser-Inuced Periodic Surface Structures (LIPSS) are formed via Surface Plasmon Polaritons (SPPs). The study establishes the mapping relationship between pulse parameters and LIPSS morphology, identifying the process window for the transition from High (HSFL) to Low Spatial Frequency LIPSS (LSFL).

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无压烧结碳化硅陶瓷的红外飞秒激光烧蚀行为及机理研究

无压烧结碳化硅（PS-SiC）陶瓷是光学和电子元件的关键材料，但其在红外飞秒（IR-fs）激光照射下的烧蚀机理尚不清楚。本文研究了PS-SiC的烧蚀阈值、培养效应和微观组织演变。利用面积外延法，发现当累积脉冲数从1增加到100时，烧蚀阈值从4.97 J/cm2降低到1.49 J/cm2，孵化因子为0.73。由于SiC的禁带较宽，红外激光的光子能量不足以诱导Si-C键的光化学分解，光热效应主要驱动PS-SiC陶瓷的烧蚀。PS-SiC陶瓷热分解形成Si、SiO2和C的产物沉积在烧蚀区表面，并伴有非晶碳向石墨和非晶α-Si向结晶C -Si的相变。此外，激光诱导周期表面结构（LIPSS）是通过表面等离子激元（SPPs）形成的。建立了脉冲参数与LIPSS形态之间的映射关系，确定了从高（HSFL）到低空间频率LIPSS （LSFL）过渡的过程窗口。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Ceramics International 工程技术-材料科学：硅酸盐

CiteScore

9.40

自引率

15.40%

发文量

4558

审稿时长

25 days

期刊介绍： Ceramics International covers the science of advanced ceramic materials. The journal encourages contributions that demonstrate how an understanding of the basic chemical and physical phenomena may direct materials design and stimulate ideas for new or improved processing techniques, in order to obtain materials with desired structural features and properties. Ceramics International covers oxide and non-oxide ceramics, functional glasses, glass ceramics, amorphous inorganic non-metallic materials (and their combinations with metal and organic materials), in the form of particulates, dense or porous bodies, thin/thick films and laminated, graded and composite structures. Process related topics such as ceramic-ceramic joints or joining ceramics with dissimilar materials, as well as surface finishing and conditioning are also covered. Besides traditional processing techniques, manufacturing routes of interest include innovative procedures benefiting from externally applied stresses, electromagnetic fields and energetic beams, as well as top-down and self-assembly nanotechnology approaches. In addition, the journal welcomes submissions on bio-inspired and bio-enabled materials designs, experimentally validated multi scale modelling and simulation for materials design, and the use of the most advanced chemical and physical characterization techniques of structure, properties and behaviour. Technologically relevant low-dimensional systems are a particular focus of Ceramics International. These include 0, 1 and 2-D nanomaterials (also covering CNTs, graphene and related materials, and diamond-like carbons), their nanocomposites, as well as nano-hybrids and hierarchical multifunctional nanostructures that might integrate molecular, biological and electronic components.