Airborne molecular contaminants sensors for high-yield and high-quality semiconductor manufacturing

Abstract

As semiconductor processes scale down to sub-10 nm nodes, airborne molecular contaminants (AMCs) have become critical factors affecting product yield and quality. Conventional analytical techniques face limitations in implementing real-time, multi-point monitoring across increasingly large cleanroom facilities due to high costs and spatial constraints. As an alternative, chemoresistive gas sensors have gained significant attention owing to their high sensitivity, cost-effective design, and facile electronic integration. This review highlights the impact of AMCs on device performance in semiconductor manufacturing environments and systematically summarizes the latest sensing strategies for each AMC group, including acidic, basic, and other species, such as volatile organic compounds (VOCs). By integrating research on chemoresistive sensors in environmental monitoring and safety applications, it also presents comprehensive strategies for developing high-performance sensors applicable to the semiconductor industry. Finally, the review discusses both the potential and the remaining technical challenges of implementing real-time AMC monitoring systems in future semiconductor manufacturing environments.