Suppression of mid-spatial-frequency errors in conformal vibration polishing of aspheric optical elements: A review

Abstract

Mid-spatial-frequency (MSF) errors in aspheric optical elements remain a critical bottleneck limiting machining accuracy and functional performance in high-end optical manufacturing. Conventional methods, such as sub-aperture polishing (SAP), rely on path optimization to match surface curvature, yet they impose high demands on machine dynamics, necessitate path simplification, and often require secondary corrections—leading to extended cycles and elevated costs. To overcome these limitations, Conformal Vibration Polishing (CVP) has been developed as a full-aperture-based alternative. By employing high-frequency conformal contact motion between the tool and workpiece, CVP achieves flexible conformal adaptability and real-time adjustment, effectively avoiding path-induced and tool-edge-induced MSF errors. This results in a highly stable and consistent material removal process, enabling efficient and precise convergence of MSF errors. This review systematically examines the development, principles, and material removal characteristics of CVP, with a focus on its mechanism for suppressing MSF errors in aspheric optics. A comparative analysis with SAP highlights the technical advantages and suitable application scenarios of CVP. Finally, future research directions are outlined, positioning CVP as a key technology capable of overcoming the MSF error bottleneck and guiding the future of precision optical surfacing.